Maskless exposure apparatus and stitching exposure method using the same
    42.
    发明申请
    Maskless exposure apparatus and stitching exposure method using the same 有权
    无掩模曝光装置和使用其的缝合曝光方法

    公开(公告)号:US20110267594A1

    公开(公告)日:2011-11-03

    申请号:US13064679

    申请日:2011-04-08

    IPC分类号: G03B27/54

    摘要: Disclosed herein are a maskless exposure apparatus configured to perform exposure by tilting a beam spot array with respect to a scan direction (Y-axis direction) thus preventing stitching stripes and a stitching method using the same. A step distance, in which exposure dose uniformity in a stitching area is within a tolerance range, is calculated using actual position data of beam spots constituting the beam spot array on an exposure plane, and if necessary, using beam power data and/or beam size data. As exposure is performed based on image data conforming to the step distance, the stitching area has a uniform exposure dose, enabling exposure without stitching stripes.

    摘要翻译: 这里公开了一种无掩模曝光装置,其被配置为通过相对于扫描方向(Y轴方向)倾斜光束阵列来进行曝光,从而防止缝合条纹和使用其的缝合方法。 使用在曝光平面上构成束斑阵列的光束点的实际位置数据计算缝合区域中的曝光剂量均匀性在公差范围内的步距,并且如果需要,使用光束功率数据和/或光束 大小数据。 当基于符合步距的图像数据进行曝光时,缝合区域具有均匀的曝光量,能够在不缝合条纹的情况下进行曝光。

    Electrolyte for Lithium Secondary Battery Comprising Chelating Agent and Lithium Secondary Battery Using the Same
    46.
    发明申请
    Electrolyte for Lithium Secondary Battery Comprising Chelating Agent and Lithium Secondary Battery Using the Same 有权
    用于锂二次电池的电解液包括螯合剂和使用其的锂二次电池

    公开(公告)号:US20080280211A1

    公开(公告)日:2008-11-13

    申请号:US12095845

    申请日:2006-12-01

    IPC分类号: H01M10/26

    摘要: Disclosed herein is an electrolyte for lithium secondary batteries comprising: a chelating agent, which forms complexes with transition metal ions in the battery, and at the same time does not react and coordinate with lithium ions; a non-aqueous solvent; and an electrolyte salt, as well as a lithium secondary battery comprising the electrolyte. The chelating agent, which is contained in the electrolyte for lithium secondary batteries, can suppress a side reaction in which transition metal ions are reduced and deposited as transition metals on the anode. Also, the chelating agent can suppress internal short-circuits in the battery and the resulting voltage drop of the battery and a reduction in the safety and performance of the battery, which can occur when transition metals are deposited on the anode.

    摘要翻译: 本发明公开了一种锂二次电池用电解液,其特征在于,包括螯合剂,其与电池中的过渡金属离子形成配合物,同时不与锂离子反应并配位; 非水溶剂; 和电解质盐,以及包含电解质的锂二次电池。 包含在用于锂二次电池的电解质中的螯合剂可以抑制过渡金属离子被还原并沉积在阳极上作为过渡金属的副反应。 此外,螯合剂可以抑制电池中的内部短路和电池的所得电压下降以及当阳极上沉积过渡金属时可能发生的电池的安全性和性能的降低。