公开(公告)号：US06849471B2

公开(公告)日：2005-02-01

申请号：US10402789

申请日：2003-03-28

Applicant: Satyadev R. Patel ,  Jonathan C. Doan

Inventor： Satyadev R. Patel ,  Jonathan C. Doan

IPC: B81B7/00 ,  B81C20060101 ,  B81C1/00 ,  H01L21/00 ,  H01L21/76

CPC classification number: B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

Abstract: A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

公开(公告)号：US06844959B2

公开(公告)日：2005-01-18

申请号：US10305509

申请日：2002-11-26

Applicant: Andrew G. Huibers ,  Satyadev R. Patel ,  Robert M. Duboc, Jr.

Inventor： Andrew G. Huibers ,  Satyadev R. Patel ,  Robert M. Duboc, Jr.

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08 ,  G02B26/00 ,  B32B9/00 ,  G09G3/34

CPC classification number: G02B26/0841 ,  B82Y30/00 ,  Y10T428/30

Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.

Abstract translation: 公开了投影系统，空间光调制器和用于形成微镜的方法。 衬底包括用于静电偏转微镜元件的电路和电极，微镜元件设置在形成空间光调制器的这种元件的阵列内。 在一个实施例中，衬底是具有电路和电极的硅衬底，用于静电地驱动相邻的微镜元件，并且衬底被完全或选择性地覆盖有光吸收材料。

公开(公告)号：US06804039B1

公开(公告)日：2004-10-12

申请号：US10692386

申请日：2003-10-22

Applicant: Jonathan C. Doan ,  Satyadev R. Patel

Inventor： Jonathan C. Doan ,  Satyadev R. Patel

IPC: G02F2600

CPC classification number: B81B3/0035 ,  B81B2201/042 ,  G02B26/0833

Abstract: A method and an improved multilayer hinge structure for use in a micromirror device for a spatial light modulator are provided herein. The micromirror device presents a conductive, composite torsion hinge with improved mechanical reliability, achieved by optimizing the geometry of the hinge, which minimizes the amount of residual twist, fixed torsional stiffness and fixed rate of plastic deformation in the mechanically undesirable hinge element. A method and its alternatives are disclosed herein by the present invention for manufacturing such multilayer hinge structure.

Abstract translation: 本文提供了一种用于空间光调制器的微反射镜装置中的方法和改进的多层铰链结构。 微反射镜装置呈现出具有改善的机械可靠性的导电复合扭转铰链，其通过优化铰链的几何形状而实现，其最大限度地减少机械不需要的铰链元件中的残余扭曲量，固定的扭转刚度和固定的塑性变形速率。 本发明公开了一种制造这种多层铰链结构的方法及其替代方案。