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公开(公告)号：US07866036B2
公开(公告)日：2011-01-11
申请号：US12250652
申请日：2008-10-14
Applicant: Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
Inventor： Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
CPC classification number: G02B26/0841 , G02B26/0833 , Y10T29/49155
Abstract: A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
Abstract translation: 本文公开了一种微镜器件及其制造方法。 微镜装置包括各自具有导电层的镜板，铰链和柱。 铰链，镜板和柱中的一个还包括电绝缘层。 为了实现铰链，镜板和柱的导电层之间的电连接，绝缘层被图案化。
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公开(公告)号：US06952302B2
公开(公告)日：2005-10-04
申请号：US10365951
申请日：2003-02-12
Applicant: Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
Inventor： Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
CPC classification number: G02B26/0841 , G02B26/0833
Abstract: A method and spatial light modulator are provided herein. The spatial light modulator has a higher resolution and an increased fill factor. The spatial light modulator also provides an increased contrast ratio. Furthermore, the spatial light modulator of the present invention can be operated in the absence of polarized light and that has improved electro-mechanical performance and robustness with respect to manufacturing. A method and its alternative are disclosed herein by the present invention for manufacturing the spatial light modulator.
Abstract translation: 本文提供了一种方法和空间光调制器。 空间光调制器具有更高的分辨率和更高的填充因子。 空间光调制器还提供增加的对比度。 此外，本发明的空间光调制器可以在没有偏振光的情况下操作，并且在制造方面具有改善的机电性能和鲁棒性。 通过本发明在此公开了用于制造空间光调制器的方法及其替代方案。
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3.发明授权公开(公告)号：US06913942B2
公开(公告)日：2005-07-05
申请号：US10402889
申请日：2003-03-28
Applicant: Satyadev R. Patel , Jonathan C. Doan
Inventor： Satyadev R. Patel , Jonathan C. Doan
IPC: B81B20060101 , B81B3/00 , H01L21/00
CPC classification number: B81C1/00476 , B81B2201/042 , B81C2201/0107
Abstract: A sacrificial layer and a method for applying said sacrificial layer in fabricating microelectromechanical devices are disclosed herein. The sacrificial layer comprises an early transition metal. Specifically, the sacrificial layer comprises an early transition metal element, an early transition metal alloy or an early transition metal silicide.
Abstract translation: 本文公开了牺牲层和在制造微机电装置中施加所述牺牲层的方法。 牺牲层包括早期的过渡金属。 具体地，牺牲层包括早期过渡金属元素，早期过渡金属合金或早期过渡金属硅化物。
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公开(公告)号：US06960305B2
公开(公告)日：2005-11-01
申请号：US10402777
申请日：2003-03-28
Applicant: Jonathan C. Doan , Satyadev R. Patel , Andrew G. Huibers , Jason S. Reid
Inventor： Jonathan C. Doan , Satyadev R. Patel , Andrew G. Huibers , Jason S. Reid
CPC classification number: C23F4/00 , B81B2201/045 , B81C1/00476 , C03C17/36 , C03C17/3663 , G02B26/0841 , H01L21/32135
Abstract: A method for making a spatial light modulator is disclosed, that comprises forming an array of micromirrors each having a hinge and a micromirror plate held via the hinge on a substrate, the micromirror plate being disposed in a plane separate from the hinge and having a hinge made of a transition metal nitride, followed by releasing the micromirrors in a spontaneous gas phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
Abstract translation: 公开了一种用于制造空间光调制器的方法，其包括形成各自具有铰链的微镜阵列和通过所述铰链保持在基板上的微镜板，所述微镜板设置在与所述铰链分离的平面中并且具有铰链 由过渡金属氮化物制成，然后在自发气相化学蚀刻剂中释放微反射镜。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。
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公开(公告)号：US20090039536A1
公开(公告)日：2009-02-12
申请号：US12250652
申请日：2008-10-14
Applicant: Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, JR.
Inventor： Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, JR.
IPC: B29D11/00
CPC classification number: G02B26/0841 , G02B26/0833 , Y10T29/49155
Abstract: A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
Abstract translation: 本文公开了一种微镜器件及其制造方法。 微镜装置包括各自具有导电层的镜板，铰链和柱。 铰链，镜板和柱中的一个还包括电绝缘层。 为了实现铰链，镜板和柱的导电层之间的电连接，绝缘层被图案化。
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Patent Agency Ranking
公开(公告)号：US07436573B2
公开(公告)日：2008-10-14
申请号：US11181079
申请日：2005-07-13
Applicant: Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
Inventor： Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
CPC classification number: G02B26/0841 , G02B26/0833 , Y10T29/49155
Abstract: A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
Abstract translation: 本文公开了一种微镜器件及其制造方法。 微镜装置包括各自具有导电层的镜板，铰链和柱。 铰链，镜板和柱中的一个还包括电绝缘层。 为了实现铰链，镜板和柱的导电层之间的电连接，绝缘层被图案化。
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公开(公告)号：US06849471B2
公开(公告)日：2005-02-01
申请号：US10402789
申请日：2003-03-28
Applicant: Satyadev R. Patel , Jonathan C. Doan
Inventor： Satyadev R. Patel , Jonathan C. Doan
IPC: B81B7/00 , B81C20060101 , B81C1/00 , H01L21/00 , H01L21/76
CPC classification number: B81C1/00793 , B81B2201/042 , B81C2201/053
Abstract: A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.
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8.发明授权公开(公告)号：US06804039B1
公开(公告)日：2004-10-12
申请号：US10692386
申请日：2003-10-22
Applicant: Jonathan C. Doan , Satyadev R. Patel
Inventor： Jonathan C. Doan , Satyadev R. Patel
IPC: G02F2600
CPC classification number: B81B3/0035 , B81B2201/042 , G02B26/0833
Abstract: A method and an improved multilayer hinge structure for use in a micromirror device for a spatial light modulator are provided herein. The micromirror device presents a conductive, composite torsion hinge with improved mechanical reliability, achieved by optimizing the geometry of the hinge, which minimizes the amount of residual twist, fixed torsional stiffness and fixed rate of plastic deformation in the mechanically undesirable hinge element. A method and its alternatives are disclosed herein by the present invention for manufacturing such multilayer hinge structure.
Abstract translation: 本文提供了一种用于空间光调制器的微反射镜装置中的方法和改进的多层铰链结构。 微反射镜装置呈现出具有改善的机械可靠性的导电复合扭转铰链，其通过优化铰链的几何形状而实现，其最大限度地减少机械不需要的铰链元件中的残余扭曲量，固定的扭转刚度和固定的塑性变形速率。 本发明公开了一种制造这种多层铰链结构的方法及其替代方案。
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9.发明授权公开(公告)号：US07671428B2
公开(公告)日：2010-03-02
申请号：US11102186
申请日：2005-04-07
Applicant: Satyadev R. Patel , Andrew G. Huibers , Steve S. Chiang
Inventor： Satyadev R. Patel , Andrew G. Huibers , Steve S. Chiang
IPC: H01L21/50
CPC classification number: B81C1/00214 , B81B7/0077 , B81B2201/042 , B81C1/00333 , B81C1/00896 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , H01L24/97 , H01L2224/48091 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01058 , H01L2924/01072 , H01L2924/01074 , H01L2924/01077 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/09701 , H01L2924/10253 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/1433 , H01L2924/15787 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00014 , H01L2224/85 , H01L2924/00
Abstract: A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.
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10.发明授权Micromirror having reduced space between hinge and mirror plate of the micromirror 有权微镜具有减小微镜的铰链和镜板之间的空间公开(公告)号：US07002726B2
公开(公告)日：2006-02-21
申请号：US11034294
申请日：2005-01-11
Applicant: Satyadev R. Patel , Andrew G. Huibers
Inventor： Satyadev R. Patel , Andrew G. Huibers
IPC: G02B26/00
CPC classification number: B82Y30/00 , G02B26/0841 , H04N5/7458
Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
Abstract translation: 公开了一种空间光调制器，以及用于制造这样的调制器的方法，该调制器包括微镜器件阵列。 根据所使用的光源确定中心到中心的距离和相邻的微反射镜装置之间的间隙，以优化光学效率和性能质量。 微反射镜装置包括形成在基底上的铰链支撑件和由铰链支撑件保持的铰链。 镜板通过触点连接到铰链，并且根据镜板的期望的最大旋转角度，相邻微镜之间的最佳间隙和间距来确定镜板和铰链之间的距离。 在制造这种空间光调制器的方法中，将一个牺牲层沉积在衬底上，随后形成镜板，并且另一牺牲层沉积在镜板上，随后形成铰链支架。 通过具有自发气相化学蚀刻剂的相邻反射镜装置之间的小间隙去除两个牺牲层。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。
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