Multiple axis reticle
    41.
    发明授权
    Multiple axis reticle 失效
    多轴光罩

    公开(公告)号:US4957357A

    公开(公告)日:1990-09-18

    申请号:US418374

    申请日:1989-10-06

    IPC分类号: G02B27/32 G02B27/64

    CPC分类号: G02B27/32 G02B27/64

    摘要: A reticle (10) permits the alignment of three orthogonal axes (X, Y and Z) that intersect at a common target point (30). Thin, straight filaments (12, 14 and 16) are supported on a frame (20). The filaments are each contained in a different orthogonal plane (S.sub.xy, S.sub.xz, and S.sub.yz) and each filament intersects two of the three orthogonal axes. The filaments, as viewed, along the frame axis (22), give the appearance of a triange (24) with a V (17) extending from each triangle vertex (25, 26, and 27). When axial alignment is achieved, the filament portions adjacent to a triangle vertex are seen (along the axis of interest) as a right-angle cross, whereas these filament portions are seen to intersect at an oblique angle when axial misalignment occurs. The reticle is open in the region near the target point leaving ample space for alignment aids such as a pentaprism 54 or a cube mirror 41.

    摘要翻译: 标线片(10)允许在共同的目标点(30)处相交的三个正交轴(X,Y和Z)的对准。 薄的直的细丝(12,14和16)被支撑在框架(20)上。 长丝各自包含在不同的正交平面(Sxy,Sxz和Syz)中,并且每个细丝与三个正交轴中的两个相交。 沿着框架轴线(22)观察的长丝给出具有从每个三角形顶点(25,26和27)延伸的V(17)的三角形(24)的外观。 当实现轴向对准时,可以看到与三角形顶点相邻的细丝部分(沿着感兴趣的轴线)为直角十字,而当发生轴向不对准时,可以看到这些细丝部分以斜角相交。 在目标点附近的区域中打开掩模版,留下足够的空间用于诸如五棱镜54或立体镜41的对准辅助物。