OPTICAL EYEPIECE USING SINGLE-SIDED PATTERNING OF GRATING COUPLERS

    公开(公告)号:US20210271070A1

    公开(公告)日:2021-09-02

    申请号:US17246936

    申请日:2021-05-03

    Abstract: An eyepiece includes a substrate and an in-coupling grating patterned on a single side of the substrate. A first grating coupler is patterned on the single side of the substrate and has a first grating pattern. The first grating coupler is optically coupled to the in-coupling grating. A second grating coupler is patterned on the single side of the substrate adjacent to the first grating coupler. The second grating coupler has a second grating pattern different from the first grating pattern. The second grating coupler is optically coupled to the in-coupling grating.

    Method and system for tunable gradient patterning using a shadow mask

    公开(公告)号:US10747012B2

    公开(公告)日:2020-08-18

    申请号:US16705127

    申请日:2019-12-05

    Abstract: A method of depositing a variable thickness material includes providing a substrate and providing a shadow mask having a first region with a first aperture dimension to aperture periodicity ratio and a second region with a second aperture dimension to aperture periodicity ratio less than the first aperture dimension to aperture periodicity ratio. The method also includes positioning the shadow mask adjacent the substrate and performing a plasma deposition process on the substrate to deposit the variable thickness material. A layer thickness adjacent the first region is greater than a layer thickness adjacent the second region.

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