Method for manufacturing organic thin film
    42.
    发明授权
    Method for manufacturing organic thin film 失效
    制造有机薄膜的方法

    公开(公告)号:US4927589A

    公开(公告)日:1990-05-22

    申请号:US287281

    申请日:1988-12-21

    IPC分类号: B05C3/02 B05D1/20

    摘要: A film manufacturing method which utilizes a trough storing a liquid therein. The liquid surface of the liquid forms a developing region in which a monomolecular film of organic molecules is developed. The developed monomolecular film is compressed by a barrier to a predetermined surface pressure. A workpiece having a build-up surface is moved by a vertical moving mechanism in a direction perpendicular to the developing region through the monomolecular film while being moved ahead of the build-up surface in a horizontal direction by a horizontal moving mechanism, so that the monomolecular film is built up on the build-up surface.