公开(公告)号：US4376583A

公开(公告)日：1983-03-15

申请号：US262866

申请日：1981-05-12

申请人： W. Jerry Alford ,  Charles J. Cushing ,  James D. Hunt ,  Michael L. Smith ,  Richard D. Vander Neut ,  James L. Wilkes

发明人： W. Jerry Alford ,  Charles J. Cushing ,  James D. Hunt ,  Michael L. Smith ,  Richard D. Vander Neut ,  James L. Wilkes

IPC分类号： H01L21/66 ,  G01N21/88 ,  G01N21/956 ,  G01N21/00

CPC分类号： G01N21/88

摘要： A system for laser scanning a relatively movable reflective surface element and inspecting that surface by monitoring the reflected energy in both light and dark channel receivers. Flaws occurring on the surface of the element, depending on the types of flaws, cause various frequency components to be present in the reflected energy and affect the amount of energy reflected to the light and dark channel receivers. Circuitry is included to detect and classify the various types of flaws as they are scanned, to compute the condition of the inspected element and to grade that inspected element as being in an acceptable state or in one of a plurality of unacceptable states. The described reflective surface element is a silicon wafer of the type used as the base substrate in fabricating integrated circuits and other electronic components.

摘要翻译： 一种用于激光扫描相对可移动的反射表面元件的系统，并且通过监测暗和暗通道接收器中的反射能量来检查该表面。 根据瑕疵的类型，在元件的表面上出现的缺陷导致反射能量中存在各种频率分量并影响反射到光和暗通道接收器的能量的量。 包括电路以在扫描时检测和分类各种类型的缺陷，以计算被检查元件的状态并将被检查元件分级为处于可接受状态或多个不可接受状态之一。 所描述的反射表面元件是在制造集成电路和其它电子部件中用作基底的类型的硅晶片。