公开(公告)号：US5903697A

公开(公告)日：1999-05-11

申请号：US898473

申请日：1997-07-22

申请人： Yasufumi Yamada ,  Masahiro Yanagisawa ,  Hiroaki Okano ,  Keiichi Higuchi ,  Hisato Uetsuka ,  Tatsuo Teraoka ,  Satoshi Aoki ,  Yasunori Iwafuji

发明人： Yasufumi Yamada ,  Masahiro Yanagisawa ,  Hiroaki Okano ,  Keiichi Higuchi ,  Hisato Uetsuka ,  Tatsuo Teraoka ,  Satoshi Aoki ,  Yasunori Iwafuji

IPC分类号： G02B6/122 ,  G02B6/13 ,  G02B6/132 ,  G02B6/136 ,  G02B6/42 ,  H01L27/15 ,  G02B6/10

CPC分类号： G02B6/132 ,  G02B6/136 ,  G02B6/42

摘要： An optical waveguide 3 comprises a substrate like a Si substrate having a projection with a flat surface and inclined side surfaces thereon, a buffer layer having a refractive index of n.sub.0 formed on lower surfaces of the substrate, a secondary buffer layer having a refractive index of n.sub.0 formed on the buffer layer, a core waveguide having a refractive index of n.sub.1 formed on the secondary buffer layer and a cladding layer having a refractive index of n.sub.0 covering the core waveguide. The flat surface of the projection 31 is exposed through an opening. The secondary buffer layer controls a transmission loss increase caused by partial thickness differences of the ground buffer layer or scattering by scratches or strains created by the grind.

摘要翻译： 光波导3包括具有平坦表面和倾斜侧表面的突起的Si衬底的衬底，形成在衬底的下表面上的折射率为n0的缓冲层，折射率为 n0，形成在二次缓冲层上的折射率为n1的芯波导和覆盖芯波导的折射率为n0的包覆层。 突起31的平坦表面通过开口露出。 次级缓冲层控制由地面缓冲层的部分厚度差异引起的传输损耗增加或由研磨产生的划痕或应变的散射。