公开(公告)号：US06394733B1

公开(公告)日：2002-05-28

申请号：US09719032

申请日：2001-01-12

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

IPC分类号： B65G4907

CPC分类号： H01L21/67748 ,  H01L21/67017 ,  H01L21/67751 ,  Y10S414/135 ,  Y10S414/139

摘要： A substrate body transfer apparatus which is capable of isolating the atmospheres of an external processing apparatus and an air conveyance apparatus and preventing the mutual contamination thereof, and which is capable of conducting the transfer of substrate bodies at a low level of particulate matter and contamination which satisfies the ultra-clean level. The substrate body transfer apparatus is provided with a vacuum container having an entrance and exit which communicate with the interior space of an air conveyance apparatus and the interior space of an external processing apparatus; a horizontal disc-shaped upper part valve and lower part valve are housed within the vacuum container and after the substrate body has been placed in a space surrounded by the upper and lower valves and this space has been sealed, the space is evacuated or the gas therein is replaced.

摘要翻译： 一种基板体传送装置，其能够隔离外部处理装置和空气输送装置的气氛并防止其相互污染，并且能够以低水平的颗粒物质和污染物进行基板主体的转印 满足超清洁水平。 基板主体传送装置设置有具有与空气输送装置的内部空间和外部处理装置的内部空间连通的入口和出口的真空容器; 水平圆盘形上部阀和下部阀被容纳在真空容器内，并且在基板主体已经被放置在由上部和下部阀所围绕的空间中并且该空间已被密封之后，空间被抽真空或气体 在其中被替换。

公开(公告)号：US5138105A

公开(公告)日：1992-08-11

申请号：US779465

申请日：1991-10-18

申请人： Masao Ninomiya ,  Masao Kikuchi ,  Masaru Umeda ,  Motojuro Yamaya

发明人： Masao Ninomiya ,  Masao Kikuchi ,  Masaru Umeda ,  Motojuro Yamaya

IPC分类号： B01D53/22 ,  B01D12/00 ,  C07C29/76 ,  H01L21/304

CPC分类号： C07C29/76

摘要： A lower alcohol is recovered from a mixed liquid thereof with water, derived from a vapor drying procedure for a water-wetted article, for example, a water-washed lens or semiconductor wafer, by feeding the mixed liquid of a lower alcohol with water from the vapor drying procedure to a vaporizer; vaporizing the mixed liquid; feeding the mixed vapor into a gas-separating module comprising at least one gas-separating membrane, for example, composed of a aromatic polyimide hollow fiber, which allows a selective permeation of water vapor from a feed side to a permeated side therethrough, withdrawing a non-permeated vapor fraction containing the lower alcohol in an increased concentration from the feed side, and converting the vapor fraction to a high purity lower alcohol liquid by cooling, while discharging a permeated vapor fraction containing water in an increased concentration from the permeated side.

摘要翻译： 通过将来自水润湿物品例如水洗透镜或半导体晶片的蒸气干燥程序从其与水的混合液体中回收低级醇，通过将低级醇的混合液体与水 蒸发器的蒸气干燥程序; 蒸发混合液体; 将混合蒸气输送到气体分离模块中，所述气体分离模块包括至少一个气体分离膜，例如由芳族聚酰亚胺中空纤维组成的气体分离膜，其允许水蒸汽从进料侧到渗透侧的选择性渗透通过其抽出 含有从进料侧增加浓度的低级醇的非透过蒸气馏分，并通过冷却将蒸气馏分转化成高纯度低级醇液体，同时从渗透侧排出含有浓度增加浓度的水的透过蒸气馏分。