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    Substrate transfer device and operating method thereof
    1.
    发明授权
    Substrate transfer device and operating method thereof 失效
    基片转印装置及其操作方法

    公开(公告)号：US06447217B1

    公开(公告)日：2002-09-10

    申请号：US09720764

    申请日：2001-03-26

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

    IPC分类号： B65G5316

    CPC分类号： H01L21/6835 ,  G03F7/7075 ,  H01L21/67778 ,  H01L21/67784 ,  H01L21/6838 ,  Y10S414/138

    摘要： A substrate body transfer apparatus, and an operating method therefor, capable of inserting and extracting substrate body into and from a cassette using air conveyance without employing a transfer mechanism such as those in which direct contact is made with the substrate body when inserting or extracting a thin plate-shaped substrate body into or from a cassette. The substrate body transfer apparatus is employed when thin plate-shaped substrate body are extracted from or inserted into cassettes which store the substrate body. The substrate body transfer apparatus includes an air conveyance hand which is provided with a plurality of gas nozzles at the conveyance surface which opposes the rear surface of the substrate body and which has the function of conducting the flotation or grounding of the substrate body, the catching or launch of the substrate body, or the centering of the substrate body; and a cassette platform which has a unitary structure comprising a cassette platform seat on which the cassette is placed and which is provided with a mechanism for horizontally advancing and retracting the cassette with respect to the air conveyance hand, and a mechanism for raising and lowering the cassette platform seat at a predetermined pitch.

    摘要翻译： 一种基板体转印装置及其操作方法，其能够使用空气输送将基板本体插入和取出，而不使用转印机构，例如当插入或提取基板主体时与基板主体直接接触 薄板状基板体进入或从盒中取出。 当薄板状基板主体从存储基板主体的盒中提取或插入到盒中时，采用基板主体传送装置。 基板主体传送装置包括：空气传送手，其在与基板主体的后表面相对的传送表面处设置有多个气体喷嘴，并具有进行基板主体的浮选或接地的功能， 或基板主体的发射，或基板主体的定心; 以及具有整体结构的盒式平台，其包括盒放置座的盒平台座，并且设置有用于使盒相对于空气传送手水平地前进和后退的机构，以及用于升高和降低 盒式平台座以预定间距。

    Substrate body transfer apparatus
    2.
    发明授权
    Substrate body transfer apparatus 失效
    基体转运装置

    公开(公告)号：US06394733B1

    公开(公告)日：2002-05-28

    申请号：US09719032

    申请日：2001-01-12

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

    IPC分类号： B65G4907

    CPC分类号： H01L21/67748 ,  H01L21/67017 ,  H01L21/67751 ,  Y10S414/135 ,  Y10S414/139

    摘要： A substrate body transfer apparatus which is capable of isolating the atmospheres of an external processing apparatus and an air conveyance apparatus and preventing the mutual contamination thereof, and which is capable of conducting the transfer of substrate bodies at a low level of particulate matter and contamination which satisfies the ultra-clean level. The substrate body transfer apparatus is provided with a vacuum container having an entrance and exit which communicate with the interior space of an air conveyance apparatus and the interior space of an external processing apparatus; a horizontal disc-shaped upper part valve and lower part valve are housed within the vacuum container and after the substrate body has been placed in a space surrounded by the upper and lower valves and this space has been sealed, the space is evacuated or the gas therein is replaced.

    摘要翻译： 一种基板体传送装置，其能够隔离外部处理装置和空气输送装置的气氛并防止其相互污染，并且能够以低水平的颗粒物质和污染物进行基板主体的转印 满足超清洁水平。 基板主体传送装置设置有具有与空气输送装置的内部空间和外部处理装置的内部空间连通的入口和出口的真空容器; 水平圆盘形上部阀和下部阀被容纳在真空容器内，并且在基板主体已经被放置在由上部和下部阀所围绕的空间中并且该空间已被密封之后，空间被抽真空或气体 在其中被替换。

    Air stream particulate collecting transfer apparatus
    3.
    发明授权
    Air stream particulate collecting transfer apparatus 失效
    气流颗粒物收集转运装置

    公开(公告)号：US06315501B1

    公开(公告)日：2001-11-13

    申请号：US09403380

    申请日：1999-12-27

    申请人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

    发明人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

    IPC分类号： B65G5100

    CPC分类号： H01L21/67784

    摘要： An air stream transfer apparatus capable of preventing particles in a transfer passage from adhering to an object to be processed and removing the particles. The apparatus includes that of a transfer face and a transfer passage partition both constituting a transfer passage, which are made of an electroconductive material and each have a thin insulating layer on the surface. A planer dust collecting electrode is opposed to an object to be processed and mechanism is provided for bringing the dust collecting electrode and the face to be cleared of dust close to each other while jetting air. A mechanism is provided for applying voltages between the transfer face and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode. Another apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each has a thin insulating layer on the surface. A mechanism for transferring a pre-charged semiconductive plate-shaped body along the transfer passage is provided, and the semiconductive plate-shaped body used as a dust collecting electrode.

    摘要翻译： 一种气流传送装置，其能够防止传送通道中的颗粒粘附到待处理物体并除去颗粒。 该装置包括由导电材料制成并且每个在表面上具有薄绝缘层的构成传送通道的传送面和传送通道隔板。 平板式集尘电极与待处理物体相对，并且设置有用于使灰尘收集电极和面部被灰尘彼此靠近而排出的机构，同时喷射空气。 提供了一种用于在转印面和集尘电极之间以及传送通道隔板与集尘电极之间以及传送通道隔板与集尘电极之间施加电压的机构。 另一种装置的特征在于，构成传送通道的传送面和传送通道隔板由导电材料制成，并且在表面上各具有薄的绝缘层。 提供了一种用于沿着传送通道传送预充电的半导体板状体的机构，并且用作集尘电极的半导体板状体。

    Air stream transfer apparatus
    4.
    发明授权
    Air stream transfer apparatus 失效
    气流传送装置

    公开(公告)号：US06398464B1

    公开(公告)日：2002-06-04

    申请号：US09799229

    申请日：2001-03-05

    申请人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

    发明人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

    IPC分类号： B65G5100

    CPC分类号： B65G51/03

    摘要： An air stream transfer apparatus capable of preventing particles in a transfer passage from adhering to an object to be processed and removing the particles. The apparatus includes that of a transfer face and a transfer passage partition both constituting a transfer passage, which are made of an electroconductive material and each have a thin insulating layer on the surface. A planer dust collecting electrode is opposed to an object to be processed and mechanism is provided for bringing the dust collecting electrode and the face to be cleared of dust close to each other while jetting air. A mechanism is provided for applying voltages between the transfer face and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode. Another apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each has a thin insulating layer on the surface. A mechanism for transferring a pre-charged semiconductive plate-shaped body along the transfer passage is provided, and the semiconductive plate-shaped body used as a dust collecting electrode.

    摘要翻译： 一种气流传送装置，其能够防止传送通道中的颗粒粘附到待处理物体并除去颗粒。 该装置包括由导电材料制成并且每个在表面上具有薄绝缘层的构成传送通道的传送面和传送通道隔板。 平板式集尘电极与待处理物体相对，并且设置有用于使灰尘收集电极和面部被灰尘彼此靠近而排出的机构，同时喷射空气。 提供了一种用于在转印面和集尘电极之间以及传送通道隔板与集尘电极之间以及传送通道隔板与集尘电极之间施加电压的机构。 另一种装置的特征在于，构成传送通道的传送面和传送通道隔板由导电材料制成，并且在表面上各具有薄的绝缘层。 提供了一种用于沿着传送通道传送预充电的半导体板状体的机构，并且用作集尘电极的半导体板状体。

    Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
    5.
    发明授权
    Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD 有权
    用于MOCVD的蒸发器和用于MOCVD的原料溶液的蒸发方法

    公开(公告)号：US07744698B2

    公开(公告)日：2010-06-29

    申请号：US10310578

    申请日：2002-12-05

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

    IPC分类号： C23C16/00

    CPC分类号： C23C16/4486 ,  C23C16/409

    摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod i0 being inserted into the cylindrical hollow portion.

    摘要翻译： 公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，将原料溶液5a，5b供给到 气体通道和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有另一端 连接到分散部8的气体出口7，以及用于加热蒸发管20的加热装置。蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散部8 包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 l中空部分。 杆10具有形成在更靠近蒸发部22的外周中的螺旋槽60，杆i0插入到圆筒形中空部中。

    Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus
    7.
    发明授权
    Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus 有权
    具有蒸发装置的蒸发装置和成膜装置

    公开(公告)号：US08486196B2

    公开(公告)日：2013-07-16

    申请号：US12601314

    申请日：2008-05-15

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    IPC分类号： C23C16/00 ,  F01M11/03 ,  B01D21/24 ,  B01D24/38 ,  B01D29/88 ,  B01D33/70

    CPC分类号： C23C16/407 ,  C23C16/4486

    摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.

    摘要翻译： 由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制 与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。 多个气体通道设置在平坦的盘形板上。 利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。

    VAPORIZING APPARATUS AND FILM FORMING APPARATUS PROVIDED WITH VAPORIZING APPARATUS
    8.
    发明申请
    VAPORIZING APPARATUS AND FILM FORMING APPARATUS PROVIDED WITH VAPORIZING APPARATUS 有权
    蒸气装置蒸发装置和成膜装置

    公开(公告)号：US20100173073A1

    公开(公告)日：2010-07-08

    申请号：US12601314

    申请日：2008-05-15

    申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

    IPC分类号： C23C16/455 ,  C23C16/00

    CPC分类号： C23C16/407 ,  C23C16/4486

    摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.

    摘要翻译： 由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制 与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。 多个气体通道设置在平坦的盘形板上。 利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。