公开(公告)号：US08257560B2

公开(公告)日：2012-09-04

申请号：US12805471

申请日：2010-08-02

申请人： Yoshiyuki Kamata ,  Masatoshi Sakurai ,  Satoshi Shirotori ,  Kaori Kimura

发明人： Yoshiyuki Kamata ,  Masatoshi Sakurai ,  Satoshi Shirotori ,  Kaori Kimura

IPC分类号： C23C14/00 ,  C23C14/32 ,  B44C1/22

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/59655 ,  G11B5/743 ,  G11B5/855

摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.

摘要翻译： 图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。 在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度 交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系： 深度Da大于深度Db。

公开(公告)号：US08057689B2

公开(公告)日：2011-11-15

申请号：US12705490

申请日：2010-02-12

申请人： Yousuke Isowaki ,  Kaori Kimura ,  Yoshiyuki Kamata ,  Masatoshi Sakurai

发明人： Yousuke Isowaki ,  Kaori Kimura ,  Yoshiyuki Kamata ,  Masatoshi Sakurai

IPC分类号： B44C1/22

CPC分类号： G11B5/865 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/746 ,  G11B5/855

摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.

摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 通过第一蚀刻气体去除残留在图案化抗蚀剂的凹部中的残留物，利用第一蚀刻气体，使用图案化抗蚀剂作为掩模蚀刻第二硬掩模，以将图案转移到第二硬掩模，蚀刻第一 通过不同于使用第二硬掩模的第一蚀刻气体作为掩模的第二蚀刻气体将硬掩模转印到第一硬掩模，并且执行离子束蚀刻以使暴露在凹部中的磁记录层失活 并移除第二个硬掩模。

公开(公告)号：US08017023B2

公开(公告)日：2011-09-13

申请号：US12882113

申请日：2010-09-14

申请人： Yoshiyuki Kamata ,  Kaori Kimura ,  Yousuke Isowaki ,  Masatoshi Sakurai

发明人： Yoshiyuki Kamata ,  Kaori Kimura ,  Yousuke Isowaki ,  Masatoshi Sakurai

IPC分类号： B44C1/22

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/743

摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.

摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层 通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。

公开(公告)号：US20110165438A1

公开(公告)日：2011-07-07

申请号：US13048017

申请日：2011-03-15

申请人： Yoshiyuki Kamata ,  Satoshi Shirotori ,  Kaori Kimura ,  Masatoshi Sakurai

发明人： Yoshiyuki Kamata ,  Satoshi Shirotori ,  Kaori Kimura ,  Masatoshi Sakurai

IPC分类号： G11B5/00

CPC分类号： G11B5/855

摘要： According to one embodiment, a method of manufacturing a discrete track recording medium includes forming protruded magnetic patterns on a substrate, and repeating processes of depositing a nonmagnetic material so as to be filled in recesses between the magnetic patterns and etching back the nonmagnetic material two or more times with rotating the substrate in a plane thereof by an angle less than one revolution.

摘要翻译： 根据一个实施例，制造离散轨道记录介质的方法包括在基板上形成突出的磁图案，并且重复沉积非磁性材料以便填充在磁性图案之间的凹部中并且蚀刻非磁性材料2或 更多次，使基板在其平面内以小于一转的角度旋转。

公开(公告)号：US07936537B2

公开(公告)日：2011-05-03

申请号：US12503458

申请日：2009-07-15

申请人： Kaori Kimura ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Satoshi Shirotori ,  Hiroyuki Hieda

发明人： Kaori Kimura ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Satoshi Shirotori ,  Hiroyuki Hieda

IPC分类号： G11B5/82

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/667 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865

摘要： It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.

摘要翻译： 可以改善记录和再现S / N比，再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道，每个记录磁道由磁性材料形成，而非记录部分形成在基板上，每个非记录部分分隔相邻的记录磁道，每个记录磁道包括多个 记录部分和连接部分，用于在轨道纵向方向上连接与其相邻的记录部分，并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。

公开(公告)号：US07826176B2

公开(公告)日：2010-11-02

申请号：US11723977

申请日：2007-03-22

申请人： Satoshi Shirotori ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Kaori Kimura

发明人： Satoshi Shirotori ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Kaori Kimura

IPC分类号： G11B5/72 ,  G11B5/82

CPC分类号： G11B5/82 ,  G11B5/667 ,  G11B5/72 ,  G11B5/7315 ,  G11B5/7325 ,  G11B5/855

摘要： A magnetic recording media includes a toroidal substrate, a surface thereof is divided into a recording area located in a central part between an outer peripheral edge and an inner peripheral edge, edge areas located within 100 μm or more and 2,000 μm or less from the outer and inner peripheral edges, respectively, and adjacent areas located between the edge areas and the recording area, respectively, a magnetic film on the substrate, and a protective film on the magnetic film, in which the magnetic film is thinner in the edge areas than that in the adjacent areas, and at least a part of the protective film in the edge areas is thicker than that in the adjacent areas.

摘要翻译： 磁记录介质包括环形基板，其表面被分成位于外周边缘和内周边缘之间的中心部分的记录区域，位于外侧100微米以上至2000微米以下的边缘区域 分别位于边缘区域和记录区域之间的内周边缘和相邻区域，基板上的磁性膜和磁性膜上的保护膜，其中磁性膜在边缘区域中比薄 在相邻区域中，边缘区域中的保护膜的至少一部分比相邻区域的保护膜厚。

公开(公告)号：US20100084374A1

公开(公告)日：2010-04-08

申请号：US12638841

申请日：2009-12-15

申请人： Kaori Kimura ,  Yoshiyuki Kamata ,  Satoshi Shirotori ,  Masatoshi Sakurai

发明人： Kaori Kimura ,  Yoshiyuki Kamata ,  Satoshi Shirotori ,  Masatoshi Sakurai

IPC分类号： G11B5/84

CPC分类号： G11B5/855

摘要： According to one embodiment, a method of manufacturing a magnetic recording medium comprises forming a protective film on a ferromagnetic recording layer containing Cobalt (Co) on a substrate and forming a recess in both the protective film and the ferromagnetic recording layer at a part where a nonmagnetic layer is to be formed. The method further comprises removing Co from a part of the recess of the ferromagnetic recording layer to form the nonmagnetic layer that separates magnetic patterns made of the ferromagnetic recording layer containing Co. The nonmagnetic layer has an identical chemical composition as the ferromagnetic recording layer, except for the nonmagnetic layer having a lower Co concentration than the magnetic patterns.

摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在包含钴（Co）的铁磁记录层上形成保护膜，并在保护膜和铁磁记录层中形成凹部， 将形成非磁性层。 该方法还包括从铁磁记录层的凹部的一部分去除Co以形成分离由含有Co的铁磁记录层制成的磁图案的非磁性层。非磁性层具有与铁磁记录层相同的化学成分， 对于具有比磁图案低的Co浓度的非磁性层。

公开(公告)号：US20080192606A1

公开(公告)日：2008-08-14

申请号：US11902066

申请日：2007-09-18

申请人： Kaori Kimura ,  Masatoshi Sakurai ,  Yoshiyuki Kamata

发明人： Kaori Kimura ,  Masatoshi Sakurai ,  Yoshiyuki Kamata

IPC分类号： G11B7/20 ,  G11B5/33

CPC分类号： G11B5/746 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/82 ,  G11B9/1472

摘要： A magnetic recording medium includes recording regions formed on a substrate, isolation regions formed between the recording regions so as to define the recording regions, and recording dots formed of a dot-like magnetic recording layer and arrayed in the recording regions, the recording dots including first recording dots arrayed in a line in each edge part of each recording region along the isolation region and second recording dots arrayed into a regular lattice in a central part of each recording region. A distance between a first recording dot and a second recording dot which are nearest neighboring is larger than a distance between second recording dots which are nearest neighboring.

摘要翻译： 磁记录介质包括形成在基板上的记录区域，形成在记录区域之间的隔离区域，以便限定记录区域，以及记录由点状磁记录层形成并排列在记录区域中的点，记录点包括 沿着隔离区域在每个记录区域的每个边缘部分中排列成一行的第一记录点和排列成每个记录区域的中心部分中的规则格子的第二记录点。 最邻近的第一记录点和第二记录点之间的距离大于最邻近的第二记录点之间的距离。

公开(公告)号：US20070217075A1

公开(公告)日：2007-09-20

申请号：US11724328

申请日：2007-03-15

申请人： Yoshiyuki Kamata ,  Masatoshi Sakurai ,  Satoshi Shirotori ,  Kaori Kimura

发明人： Yoshiyuki Kamata ,  Masatoshi Sakurai ,  Satoshi Shirotori ,  Kaori Kimura

IPC分类号： G11B5/82

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/59655 ,  G11B5/743 ,  G11B5/855

摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.

摘要翻译： 图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。 在图案化介质中，定义为D 的深度D B和深度D a是距离 磁性图形被填充到在交叉轨道方向或向下轨道方向上彼此相邻的磁性图案之间的第一中心部分中的非磁性材料的表面，并且D a是从 在由磁性图案包围的部分填充在第二中心部分中的非磁性材料的表面的磁性图案的表面具有深度D a a大于深度D < SUB> b 。