Piezoelectric actuator of an ink-jet printhead and method for forming the same
    51.
    发明授权
    Piezoelectric actuator of an ink-jet printhead and method for forming the same 失效
    喷墨打印头的压电致动器及其形成方法

    公开(公告)号:US07364275B2

    公开(公告)日:2008-04-29

    申请号:US10805430

    申请日:2004-03-22

    Abstract: A piezoelectric actuator for providing a driving force to a pressure chamber of an ink-jet printhead for ejecting ink by deforming a vibration plate, the vibration plate forming an upper wall of the pressure chamber, the piezoelectric actuator including a lower electrode formed on the vibration plate, a piezoelectric film having either: (a) peripheral portions, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber and having a space between the peripheral portions and the lower electrode, or (b) a lateral surface, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber, the lateral surface of the piezoelectric film substantially forming a right angle with respect to a top surface of the lower electrode, and an upper electrode formed on the piezoelectric film for applying a voltage to the piezoelectric film.

    Abstract translation: 一种压电致动器,用于通过使振动板变形来向喷墨打印头的压力室提供驱动力,所述振动板形成所述压力室的上壁,所述压电致动器包括形成在所述振动上的下电极 压电薄膜具有:(a)周边部分,在与电解槽对应的位置处形成在下部电极上并且在周边部分和下部电极之间具有空间的压电薄膜,或者(b)横向 形成在下电极上的与压力室相对应的位置处的压电膜,压电膜的侧表面相对于下电极的上表面基本形成直角,以及上电极 用于向压电膜施加电压的压电膜。

    Method for manufacturing piezoelectric ink-jet printhead
    52.
    发明申请
    Method for manufacturing piezoelectric ink-jet printhead 有权
    制造压电喷墨打印头的方法

    公开(公告)号:US20070019042A1

    公开(公告)日:2007-01-25

    申请号:US11540541

    申请日:2006-10-02

    Abstract: A piezoelectric ink-jet printhead and a method for manufacturing the same, wherein the piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates on one another and adhering them to one another. The three substrates include an upper substrate, through which an ink supply hole is formed and a pressure chamber is formed on a bottom surface thereof; an intermediate substrate, in which an ink reservoir and a damper are formed; and a lower substrate, in which a nozzle is formed. A piezoelectric actuator is monolithically formed on the upper substrate. A restrictor, which connects the ink reservoir to the pressure chamber in flow communication, may be formed on the upper substrate or intermediate substrate.

    Abstract translation: 一种压电喷墨打印头及其制造方法,其中压电喷墨打印头通过将三个单晶硅基板彼此堆叠并将它们彼此粘合而形成。 三个基板包括上基板,在其上形成有供墨孔,在其底面上形成有压力室; 中间基板,其中形成有墨水储存器和阻尼器; 以及形成有喷嘴的下基板。 压电致动器整体地形成在上基板上。 可以在上基板或中间基板上形成将油墨储存器与流动连通的压力室连接的限流器。

    Piezoelectric ink-jet printhead and method of manufacturing a nozzle plate of the same
    53.
    发明申请
    Piezoelectric ink-jet printhead and method of manufacturing a nozzle plate of the same 失效
    压电式喷墨打印头及其喷嘴板的制造方法

    公开(公告)号:US20050190232A1

    公开(公告)日:2005-09-01

    申请号:US11064834

    申请日:2005-02-25

    Abstract: In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.

    Abstract translation: 在压电喷墨打印头和喷嘴板的制造方法中,压电喷墨打印头包括流路板,该流路板具有墨流路,该墨流路包括填充有要喷射的墨的压力室,形成在 流路板的上表面,并且用于向压力室供给用于喷墨的驱动力;以及喷嘴板,其结合到流路板的下表面,该喷嘴板包括用于从通过喷嘴板钻出的压力室喷射油墨的喷嘴 。 打印头还可以包括形成在喷嘴板的下表面上的加热器,用于加热油墨流路中的油墨和/或形成在喷嘴板的下表面上或在流路板的上表面上形成的温度检测器。

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