公开(公告)号：US09627619B2

公开(公告)日：2017-04-18

申请号：US14605965

申请日：2015-01-26

Applicant: Samsung Display Co., Ltd.

Inventor： Duckjung Lee ,  Jiyoung Choung ,  Kyuhwan Hwang

IPC: H01L21/00 ,  H01L51/00 ,  C23C14/04 ,  C23C14/28 ,  H01L51/50

CPC classification number: H01L51/0013 ,  C23C14/042 ,  C23C14/12 ,  C23C14/28 ,  H01L51/0009 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/0037 ,  H01L51/0052 ,  H01L51/5012

Abstract: A thin film forming apparatus includes: a thin film source including a thin film on one surface of the thin film source to be transferred to a substrate; and a light emitter configured to apply light energy to the thin film source to transfer the thin film to the substrate.