摘要:
Provided is a micro-mechanical structure and method for manufacturing the same, including a hydrophilic surface on at least a part of a surface of the micro-mechanical structure, so as to prevent generation of an adhesion phenomenon in the process of removing a sacrificial layer to release the micro-mechanical, wherein the sacrificial layer comes into contact with the surface of the micro-mechanical structure.
摘要:
Disclosed is a coin type vibrating motor including: a rotor provided with an upper base including at least one wound coil placed on the upper surface thereof; a stator including a pair of brushes placed on the upper surface of a lower base, on which a magnet is mounted corresponding to the wound coil; and a shafting unit including a bearing member formed integrally with the upper base to surround the wound coil and the weight, and a shaft, of which the bearing member is installed on the outer periphery, wherein an oil scattering-preventing portion, which exposes an assembling region, and has an inner surface extended downwardly to a designated length while being spaced from the inner surface of the shaft, is formed integrally with the lower surface of an insulator exposed to the outside through an opening of the upper base.
摘要:
The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.