公开(公告)号：US06306291B1

公开(公告)日：2001-10-23

申请号：US09447678

申请日：1999-11-23

Applicant: Stanley R. Lueck

Inventor： Stanley R. Lueck

IPC: G01N1502

CPC classification number: B01D65/10 ,  B01D61/12 ,  G01N15/0618 ,  G01N2015/0088 ,  G01N2015/0662 ,  G01N2015/084 ,  Y02A20/131

Abstract: An apparatus for monitoring particulates in a liquid stream and the rate at which the particulates foul a filtering medium, generally a reverse osmosis membrane, to determine at what point in time the filtering medium should be cleaned or replaced. The apparatus includes a monitoring filter unit having a plurality of filter portions. The pressure drop across each filter portion, through which a sample of the feed stream is passed, is monitored. Fouling of a filter portion by accumulated particulate thereon causes an increase in the pressure drop across the filter unit. The increasing pressure drop is monitored as an indicator of the correlative or correspondent fouling of the main filtering medium to be protected. Different filter portions in the filter unit are successively used as each becomes fouled, allowing continuous monitoring for extended periods of time between filter media changes in monitoring filter unit.

Abstract translation: 用于监测液体流中的微粒的装置以及微粒污染过滤介质（通常为反渗透膜）的速率，以确定在什么时间点清洗或更换过滤介质。 该装置包括具有多个过滤器部分的监视过滤器单元。 监测每个过滤器部分上通过进料流的样品通过的压降。 过滤器部分由于其上的累积颗粒而结垢，导致过滤器单元上的压降增加。 监测增加的压降作为要被保护的主要过滤介质的相关或相应结垢的指标。 过滤器单元中的不同的过滤器部分被连续地使用，因为每个都被弄脏，允许在监控过滤器单元的过滤介质变化之间的连续监视延长的时间段。

公开(公告)号：US06275290B1

公开(公告)日：2001-08-14

申请号：US09296928

申请日：1999-04-22

Applicant: Todd A. Cerni ,  Scott Waisanen ,  Dennis J. Knowlton

Inventor： Todd A. Cerni ,  Scott Waisanen ,  Dennis J. Knowlton

IPC: G01N1502

CPC classification number: G01N15/02 ,  A61B34/10 ,  A61B90/36 ,  A61B2017/00725 ,  A61B2090/363

Abstract: A sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurries, such as the slurries used in the semiconductor industry for chemical mechanical planarization. Spectral transmission data is taken over the spectral range of 0.20-2.5 microns, utilizing specially constructed, chemically resistant sample cells of 50-2000 microns thickness, and miniature, fixed grating, linear detector array spectrometers. At wavelengths greater than one micron, the preferred design utilizes InGaAs linear detector arrays. An ultrasonic disrupter can be employed to breakup harmless soft agglomerates. In addition to direct particle size distribution measurement, the invention described here could be used to detect other fundamental causes of slurry degradation, such as foaming and jelling. The probe accomplishes continuous, real time sampling of undiluted slurry. A three-position chopper allows automated operation in an industrial environment without the need for frequent reference spectra, which would require taking the probe off-line. In other embodiments, the invention provides a quality control and/or particle size measuring system for CMP slurries using transmission data through an as-used CMP slurry flow. The process of the invention detects transmission through the flow, at select wavelengths, and determines changes in the logarithmic slope of transmission versus wavelength to detect acceptable or unacceptable CMP slurries. The process can further determine CMP slurry particle size through empirical extinction data stored in memory.

Abstract translation: 敏感粒子分布探针使用特殊处理，包括改进的Twomey / Chahine迭代收敛技术和特殊构建的样品池，以从光学致密的浆液（例如用于化学机械平面化的半导体工业中使用的浆料）获得粒度分布测量。 光谱传输数据采用0.20-2.5微米的光谱范围，采用50-2000微米厚度的特殊构造的耐化学腐蚀样品池，以及微型，固定光栅，线性检测器阵列光谱仪。 在大于1微米的波长处，优选的设计使用InGaAs线性检测器阵列。 可以使用超声波破坏器来破坏无害的软团块。 除了直接的粒度分布测量之外，本文所述的本发明可用于检测浆料降解的其它基本原因，例如起泡和起泡。 探头可以对未稀释的浆料进行连续，实时的取样。 三位置斩波器允许在工业环境中自动操作，而不需要频繁的参考光谱，这将需要将探头离线。 在其它实施方案中，本发明使用通过使用的CMP浆料流的传输数据提供用于CMP浆料的质量控制和/或粒度测量系统。 本发明的方法检测在选定波长下的流动的透射，并且确定透射率对波长对数斜率的变化以检测可接受或不可接受的CMP浆料。 该方法可以通过存储在存储器中的经验消光数据进一步确定CMP浆料粒度。

公开(公告)号：US06256096B1

公开(公告)日：2001-07-03

申请号：US09228247

申请日：1999-01-11

Applicant: Paul E. Johnson

Inventor： Paul E. Johnson

IPC: G01N1502

CPC classification number: G01N15/14

Abstract: A flow cytometer for detecting target particles such as microorganisms including biological cells and viruses as well as molecular species. The flow cytometer includes a detection system involving a CCD having a time delay integration capability to thereby increase the signal from the target particle and decrease the noise detected by the CCD. Calibration particles can be included in the sample stream of the flow cytometer for coordinating the readout of the CCD with the rate of flow of the sample stream to improve the detection capability of the CCD. Statistical analysis techniques can also be used to determine the rate of flow of target particles in the sample stream to thereby coordinate the readout rate of the CCD with the rate of flow of the target particles.

Abstract translation: 用于检测目标颗粒的流式细胞仪，例如包括生物细胞和病毒的微生物以及分子种类。 流式细胞仪包括具有时间延迟积分能力的CCD的检测系统，从而增加来自目标粒子的信号并降低由CCD检测到的噪声。 校准颗粒可以包含在流式细胞仪的样品流中，用于协调CCD的读数与样品流的流速，以提高CCD的检测能力。 统计分析技术也可用于确定样品流中目标颗粒的流速，从而将CCD的读出速率与目标颗粒的流速进行协调。

公开(公告)号：US06246474B1

公开(公告)日：2001-06-12

申请号：US09069682

申请日：1998-04-29

Applicant: Todd A. Cerni ,  Scott Waisanen

Inventor： Todd A. Cerni ,  Scott Waisanen

IPC: G01N1502

CPC classification number: G01N15/02 ,  A61B34/10 ,  A61B90/36 ,  A61B2017/00725 ,  A61B2090/363

Abstract: A very sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurries, such as the slurries used in the semiconductor industry for chemical mechanical planarization. Spectral transmission data is taken over the spectral range of 0.20-2.5 microns, utilizing specially constructed, chemically resistant sample cells of 50-250 microns thickness, and miniature, fixed grating, linear detector array spectrometers. At wavelengths greater than 1 micron, the preferred design utilizes InGaAs linear detector arrays. An ultrasonic disrupter can be employed to breakup harmless soft agglomerates. In addition to direct particle size distribution measurement, the invention described here could be used to detect other fundamental causes of slurry degradation, such as foaming and jelling. The probe accomplishes continuous, real time sampling of undiluted slurry. A three-position chopper allows automated operation in an industrial environment without the need for frequent reference spectra, which would require taking the probe off-line.

Abstract translation: 非常敏感的粒子分布探针使用特殊处理，包括改进的Twomey / Chahine迭代收敛技术和特殊构建的样品池，以从光学密度浆料（例如用于化学机械平面化的半导体工业中使用的浆料）获得粒度分布测量。 光谱传输数据采用0.20-2.5微米的光谱范围，采用50-250微米厚度的特殊构造的耐化学腐蚀样品池，以及微型，固定光栅，线性检测器阵列光谱仪。 在大于1微米的波长下，优选的设计使用InGaAs线性检测器阵列。 可以使用超声波破坏器来破坏无害的软团块。 除了直接的粒度分布测量之外，本文所述的本发明可用于检测浆料降解的其它基本原因，例如起泡和起泡。 探头可以对未稀释的浆料进行连续，实时的取样。 三位置斩波器允许在工业环境中自动操作，而不需要频繁的参考光谱，这将需要将探头离线。

公开(公告)号：US06234005B1

公开(公告)日：2001-05-22

申请号：US09206236

申请日：1998-12-07

Applicant: Youn-soo Han ,  Hyeug-ki Kim ,  Hyun-joon Kim ,  Ho-wang Kim

Inventor： Youn-soo Han ,  Hyeug-ki Kim ,  Hyun-joon Kim ,  Ho-wang Kim

IPC: G01N1502

CPC classification number: G01N15/02

Abstract: A particle analyzing system for a clean room smock includes a mannequin corresponding to the shape of a human body and having a clean room smock placed thereon. A gas supply apparatus is connected to the mannequin, and is operative to discharge a gas at a first set of sites on the mannequin. A particle supply apparatus is connected to the mannequin, and is operative to discharge particles at a second set of sites on the mannequin.

Abstract translation: 用于洁净室工作的颗粒分析系统包括对应于人体形状的人体模型，并且具有放置在其上的洁净室工作服。 气体供给装置连接到人体模型，并且可操作以在人体模型上的第一组位置排出气体。 颗粒供应装置连接到人体模型，并且可操作以在人体模型上的第二组位置处排出颗粒。

公开(公告)号：US06219138B1

公开(公告)日：2001-04-17

申请号：US09480535

申请日：2000-01-10

Applicant: Nancy L. Swanson ,  Barton D. Billard

Inventor： Nancy L. Swanson ,  Barton D. Billard

IPC: G01N1502

CPC classification number: G01N15/0205

Abstract: The particle size within a given medium is determined using a single wavelength to confirm the known particles sizes within a dispersion, or determined from two wavelengths to calculate the unknown particle sizes of a dispersion. Three wavelengths may be used to determine the unknown particle size of a dispersion of unknown concentration within a medium. The method and apparatus may be used for mono-dispersions and poly-dispersions.

Abstract translation: 使用单个波长确定给定介质内的粒度以确认分散体内的已知粒子尺寸，或由两个波长确定，以计算分散体的未知粒度。 可以使用三个波长来确定介质中未知浓度的分散体的未知粒度。 该方法和装置可用于单分散和多分散体。

公开(公告)号：US06184983B2

公开(公告)日：2001-02-06

申请号：US09037431

申请日：1998-03-10

Applicant: Dabide Yamaguchi ,  Tokio Ohto ,  Kenji Harada ,  Akinori Sasaki

Inventor： Dabide Yamaguchi ,  Tokio Ohto ,  Kenji Harada ,  Akinori Sasaki

IPC: G01N1502

CPC classification number: G01N15/0205 ,  G01N21/532

Abstract: A method of measuring turbidity includes irradiating specimen water with a light beam, using photoelectric conversion means for subjecting to photoelectric conversion the light scattered by fine particles in the specimen water, inputting a pulse signal as an input signal 7 obtainable from the photoelectric conversion whenever the fine particle passes through the light beam so as to measure its peak value in a peak holding circuit 13, obtaining the number concentration of fine particles in the specimen water on the basis of particle diameter divisions according to the measured value, and multiplying the number concentration by an individual coefficient on the basis of the particle diameter divisions in order to obtain the turbidity of the specimen water.

Abstract translation: 测量浊度的方法包括用光束照射样本水，使用光电转换装置对由样品水中的细颗粒散射的光进行光电转换，输入脉冲信号作为可从光电转换获得的输入信号7， 细粒子通过光束，以便在峰值保持电路13中测量其峰值，根据测量值根据粒径分度获得样品水中的细颗粒的数量浓度，并且将数量浓度 通过基于粒径分割的单个系数，以获得样品水的浊度。