公开(公告)号：US20060103693A1

公开(公告)日：2006-05-18

申请号：US11233005

申请日：2005-09-23

申请人： Jae-Sik Min ,  Kang-Soo Chu ,  Young-Ung Ha

发明人： Jae-Sik Min ,  Kang-Soo Chu ,  Young-Ung Ha

IPC分类号： B41J2/135

CPC分类号： B41J2/1632 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14387

摘要： An inkjet print head and method of fabricating the same. The inkjet print head includes: a substrate having an ink-feed hole, an interlayer dielectric layer formed around the ink-feed hole on the substrate, at least one metal layer formed on the interlayer dielectric layer, and an anti-moisture part formed between the ink-feed hole and the at least one metal layer to prevent ink moisture in the ink-feed hole from contacting the at least one metal layer. The inkjet print head and the method of fabricating the same are capable of preventing problems such as de-lamination between layers, electrical short-circuit, circuit malfunction, and corrosion of a metal interconnection layer, since it is possible to prevent penetration of ink moisture from layers having absorbent characteristics into the metal interconnection layer, a logic region, or a pressure driving part. Therefore, it is possible to improve the lifespan and reliability of the inkjet print head as well as to increase productivity and reduce manufacturing cost by increasing yield.

摘要翻译： 一种喷墨打印头及其制造方法。 喷墨打印头包括：具有供墨孔的基板，在基板上的供墨孔周围形成的层间电介质层，形成在层间绝缘层上的至少一个金属层和形成在层间绝缘层之间的防潮部分 所述供墨孔和所述至少一个金属层以防止所述供墨孔中的墨水水分接触所述至少一个金属层。 喷墨打印头及其制造方法能够防止层间的分层，电气短路，电路故障和金属互连层的腐蚀等问题，因为可以防止墨水湿度的渗透 从具有吸收特性的层到金属互连层，逻辑区域或压力驱动部分。 因此，可以提高喷墨打印头的寿命和可靠性，并且通过提高产量来提高生产率并降低制造成本。

公开(公告)号：US20060087535A1

公开(公告)日：2006-04-27

申请号：US11248160

申请日：2005-10-13

申请人： Sung-joon Park ,  Young-ung Ha ,  Eun-bong Han ,  Jae-sik Min

发明人： Sung-joon Park ,  Young-ung Ha ,  Eun-bong Han ,  Jae-sik Min

IPC分类号： B41J2/05

CPC分类号： B41J2/1626 ,  B41J2/1603

摘要： A method of fabricating a high efficiency inkjet print head includes forming an oxide film on a surface of a substrate, sequentially forming and patterning a heater layer and a wiring layer on the oxide film, forming a passivation layer on the heater layer and the wiring layer and patterning the passivation layer so that a heater is exposed, etching the substrate to form restrictors at both sides of the heater, forming a chamber layer on the passivation layer, forming a sacrificial layer on the chamber layer and polishing the sacrificial layer, forming a nozzle layer on the chamber layer, forming an ink-feed hole at a bottom surface of the substrate, and removing the sacrificial layer. The inkjet print head is capable of reducing energy consumption by fabricating a heater having high efficiency, and capable of maintaining good heating characteristics since an original temperature of the inkjet print head is rapidly recovered after the heater is instantly heated and electric current is not supplied. In addition, since the heater is mounted on the substrate, the inkjet print head can maintain structural integrity, and since the heater is formed in a planar shape without bent portions, the heater can be formed to a uniform thickness.

摘要翻译： 一种制造高效率喷墨打印头的方法，包括在基板的表面上形成氧化膜，在氧化膜上依次形成和图案化加热层和布线层，在加热层和布线层上形成钝化层 以及图案化所述钝化层以使得加热器暴露，蚀刻所述基板以在所述加热器的两侧形成限流器，在所述钝化层上形成室层，在所述室层上形成牺牲层并抛光所述牺牲层，形成 在所述室层上形成喷墨层，在所述基板的底面形成墨水供给孔，并除去所述牺牲层。 喷墨打印头能够通过制造高效率的加热器来降低能量消耗，并且能够保持良好的加热特性，因为在加热器被立即加热并且不提供电流之后喷墨打印头的原始温度快速恢复。 此外，由于加热器安装在基板上，喷墨打印头可以保持结构完整性，并且由于加热器形成为没有弯曲部分的平面形状，所以加热器可以形成为均匀的厚度。

公开(公告)号：US20060038855A1

公开(公告)日：2006-02-23

申请号：US11100545

申请日：2005-04-07

申请人： Kyong-Il Kim ,  Myong-Jong Kwon ,  Kwang-Ryul Kim ,  Nam-Kyun Kim ,  Byung-Ha Park ,  Yong-Shik Park ,  Eun-Bong Han ,  Young-Ung Ha ,  Sung-Joon Park ,  Jae-Sik Min

发明人： Kyong-Il Kim ,  Myong-Jong Kwon ,  Kwang-Ryul Kim ,  Nam-Kyun Kim ,  Byung-Ha Park ,  Yong-Shik Park ,  Eun-Bong Han ,  Young-Ung Ha ,  Sung-Joon Park ,  Jae-Sik Min

IPC分类号： B41J2/05

CPC分类号： B41J2/1404 ,  B41J2/1412

摘要： An inkjet print head with a high efficiency heater includes a substrate having an ink-feed hole extending therethrough to receive ink stored in a cartridge, a flow path layer to define an ink chamber in fluid communication with the ink-feed hole, a nozzle plate having a nozzle to discharge the ink from the ink chamber to an exterior, a heater located adjacent to an inner wall of the ink chamber and disposed in contact with the ink in the ink chamber, and a lead electrically connected to the heater. The heater increases thermal efficiency and maintains a stable structure. In addition, since the heater is disposed adjacent to the inner wall of the ink chamber, the heater is barely affected by the ink supply pressure or the cavitation force that results from ink bubbles shrinking.

摘要翻译： 具有高效加热器的喷墨打印头包括具有延伸穿过其中的墨供给孔以接收存储在墨盒中的墨的基板，限定与墨供给孔流体连通的墨室的流路层，喷嘴板 具有用于将墨从墨室排出到外部的喷嘴，位于墨室的内壁附近并与墨室中的墨接触设置的加热器以及与加热器电连接的引线。 加热器提高了热效率并保持了稳定的结构。 此外，由于加热器邻近墨水室的内壁设置，所以加热器几乎不受油墨供应压力或油墨气泡收缩引起的空化力的影响。

公开(公告)号：US20050255409A1

公开(公告)日：2005-11-17

申请号：US11004939

申请日：2004-12-07

申请人： Byung--ha Park ,  Young-ung Ha ,  Sung-joon Park ,  Myong-jong Kwon

发明人： Byung--ha Park ,  Young-ung Ha ,  Sung-joon Park ,  Myong-jong Kwon

IPC分类号： C08L63/00 ,  B41J2/16 ,  G03C1/492 ,  G03F7/004 ,  G03F7/038

CPC分类号： G03F7/038 ,  B41J2/1603 ,  B41J2/1631 ,  G03F7/0043 ,  G03F7/0048

摘要： A photo-curable resin composition, a method of patterning the same, an ink jet head, and a method of fabricating the same. The photo-curable resin composition includes an epoxy compound, a photo-catalyst provided as a photo-initiator, and a non-photo reactive solvent. The photo-catalyst may be a semiconductor material to generate electron-hall pairs using light energy. The semiconductor material is one selected from a group consisting of TiO2, CdS, Si, SrTiO3, WO, ZnO, SnO2, CdSe and CdTe, CdSe and CdTe. The epoxy compound may include a di-functional epoxy compound and a multi-functional epoxy compound. The non-photo reactive solvent may be one or a mixture selected from a group consisting of gamma-butyrolactone (GBL), cyclopentanone, C1-6 acetate, tetrahydrofurane (THF), and xylene. The photo-curable resin composition is patterned to form a fluid channel structure of the ink jet head.

摘要翻译： 光固化型树脂组合物，其图案化方法，喷墨头及其制造方法。 光固化树脂组合物包括环氧化合物，作为光引发剂提供的光催化剂和非光反应性溶剂。 光催化剂可以是使用光能产生电子 - 大厅对的半导体材料。 半导体材料选自TiO 2，CdS，Si，SrTiO 3，WO，ZnO，SnO 2，CdSe， 和CdTe，CdSe和CdTe。 环氧化合物可以包括二官能环氧化合物和多官能环氧化合物。 非光反应性溶剂可以是选自γ-丁内酯（GBL），环戊酮，C 1-6乙酸酯，四氢呋喃（THF）和二甲苯中的一种或其混合物。 将光固化树脂组合物图案化以形成喷墨头的流体通道结构。

公开(公告)号：US20050067376A1

公开(公告)日：2005-03-31

申请号：US10917343

申请日：2004-08-13

申请人： Byung-ha Park ,  Myong-jong Kwon ,  Young-ung Ha ,  Sung-joon Park

发明人： Byung-ha Park ,  Myong-jong Kwon ,  Young-ung Ha ,  Sung-joon Park

IPC分类号： B41J2/34 ,  B41J2/135 ,  B41J2/16 ,  G03F7/20 ,  G11B5/127

CPC分类号： B41J2/1626 ,  B41J2/1603 ,  B41J2/1631

摘要： A method of manufacturing a monolithic inkjet printhead. The method may include forming on a substrate a heater for heating ink and an electrode for supplying current to the heater, forming a passage forming layer that surrounds an ink passage by applying negative-type photoresist to the substrate and patterning the same, forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer by repeatedly applying a positive-type photoresist to the substrate having the passage forming layer and patterning the same by photolithography at least twice, forming a nozzle layer having a nozzle by applying a negative-type photoresist to the passage forming layer and the sacrificial layer and patterning the same, etching the substrate from the bottom surface thereof to be perforated and forming an ink supply hole, and removing the sacrificial layer. Since the top surface of the sacrificial layer is planarized, the shape and dimension of the ink passage can be easily controlled, thereby improving uniformity of the ink passage.

摘要翻译： 一种制造单片喷墨打印头的方法。 该方法可以包括在基板上形成用于加热油墨的加热器和用于向加热器供应电流的电极，通过向基板施加负型光致抗蚀剂形成通道形成层，以形成墨水通道，从而形成牺牲物 层，其在由通道形成层包围的空间中具有平坦化的顶表面，通过重复地向具有通道形成层的基板施加正型光致抗蚀剂，并通过光刻将其图案化至少两次，通过施加形成具有喷嘴的喷嘴层 向通道形成层和牺牲层施加负型光致抗蚀剂并对其进行图案化，从其底表面蚀刻衬底以进行穿孔并形成供墨孔，以及去除牺牲层。 由于牺牲层的顶表面被平坦化，所以可以容易地控制油墨通道的形状和尺寸，从而提高油墨通道的均匀性。