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公开(公告)号：US4555939A
公开(公告)日：1985-12-03
申请号：US590673
申请日：1984-03-19
摘要： A condition responsive sensor is provided with a flow sensor channel means that is interconnected to a capillary tube restriction. The capillary tube restriction can be readily interchanged on the device to change the response of the condition responsive sensor. A very small flow sensor is placed in the flow sensor channel. The flow sensor channel and the capillary tube restriction can be placed generally parallel to one another to reduce the overall length of the device.
摘要翻译： 条件响应传感器设置有与毛细管限制相互连接的流量传感器通道装置。 毛细管限制可以容易地在装置上互换以改变状态响应传感器的响应。 一个非常小的流量传感器被放置在流量传感器通道中。 流量传感器通道和毛细管限制可以大致平行地放置，以减少设备的整体长度。
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公开(公告)号：US4548078A
公开(公告)日：1985-10-22
申请号：US634088
申请日：1984-07-25
CPC分类号： G01F1/6845 , G01F1/684 , G01F1/6842 , G01F1/698
摘要： Disclosed is an integral flow sensor and channel assembly comprising a flow sensor having a sensing element integral to a semiconductor body. The assembly further comprises support structure for supporting the flow sensor, the support structure having a first surface. An enclosed flow channel comprises the first surface formed into a groove running below the sensing element. The flow channel comprises an inlet and an outlet for providing flow across the sensing element. The sensing element is located in the flow channel between the inlet and the outlet. The support structure comprises apparatus for flip-chip mounting the semiconductor body, and the semiconductor body is flip-chip mounted so that the sensing element is positioned over the groove in the support structure.
摘要翻译： 公开了一种整体的流量传感器和通道组件，其包括具有与半导体主体成一体的感测元件的流量传感器。 组件还包括用于支撑流量传感器的支撑结构，支撑结构具有第一表面。 封闭的流动通道包括形成在感测元件下方延伸的凹槽中的第一表面。 流动通道包括用于提供穿过感测元件的流动的入口和出口。 感测元件位于入口和出口之间的流动通道中。 支撑结构包括用于倒装芯片安装半导体本体的装置，并且半导体本体被倒装安装，使得感测元件位于支撑结构中的凹槽上方。
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公开(公告)号：US4501144A
公开(公告)日：1985-02-26
申请号：US429598
申请日：1982-09-30
CPC分类号： G01F1/698 , G01F1/6845
摘要： A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. A base supports the sensors and heater out of contact with the base with the sensors disposed on opposite sides of the heater and closely adjacent thereto.
摘要翻译： 公开了一种包括一对薄膜热传感器和薄膜加热器的流量传感器。 基座支撑传感器和加热器不与基座接触，传感器设置在加热器的相对侧并与其紧密相邻。
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