公开(公告)号：US20160252913A1

公开(公告)日：2016-09-01

申请号：US15027828

申请日：2014-10-15

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Ryousuke DOHI ,  Katsuyuki SUGITA

IPC: G05D7/06 ,  F16K7/14 ,  F16K31/00

CPC classification number: G05D7/0635 ,  F16K7/14 ,  F16K31/004 ,  G05D7/0641 ,  Y10T137/2544

Abstract: A pressure-type flow controller includes a main body provided with a fluid channel between a fluid inlet and a fluid outlet and an exhaust channel between the fluid channel and an exhaust outlet; a pressure control valve fixed to the fluid inlet of the main body for opening/closing the upstream side of the fluid channel; a pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the pressure control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; and an exhaust control valve for opening/closing the exhaust channel

Abstract translation: 压力式流量控制器包括：主体，其在流体入口和流体出口之间设置有流体通道，以及在流体通道和排气出口之间的排气通道; 固定到主体的流体入口的压力控制阀，用于打开/关闭流体通道的上游侧; 压力传感器，用于检测压力控制阀下游侧的流体通道的内部压力; 设置在排气通道的分支点的下游侧的流体通道中的孔口; 以及用于打开/关闭排气通道的排气控制阀