公开(公告)号：US5294858A

公开(公告)日：1994-03-15

申请号：US19136

申请日：1993-02-18

申请人： Hideaki Nakahata ,  Akihiro Hachigo ,  Shinichi Shikata ,  Naoji Fujimori

发明人： Hideaki Nakahata ,  Akihiro Hachigo ,  Shinichi Shikata ,  Naoji Fujimori

IPC分类号： H03H9/145 ,  H03H9/02 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H02N2/00

CPC分类号： H03H9/02582

摘要： Disclosed herein is a surface acoustic wave device employing diamond, which has an operation frequency in a range of several hundred MHz to several GHz, a high propagation velocity and a large electromechanical coefficient. This surface acoustic wave comprises a substrate, a diamond layer which is formed on the substrate, a ZnO layer which is formed on the diamond layer, and interdigital electrodes which are formed on the ZnO layer, and utilizes a second order mode of a surface acoustic wave which is excited in a structure satisfying (2.pi..H/.lambda.)=0.9 to 2.3 where H represents the thickness of the ZnO layer and .lambda. represents the wavelength of the surface acoustic wave. This surface acoustic wave device can be used in an extremely high frequency range, whereby the same is applicable to a resonator, a delay line, a signal processing device, a convolver, a correlator or the like in addition to a filter.

摘要翻译： 本发明公开了一种采用金刚石的弹性表面波器件，其工作频率范围为数百MHz至数GHz，传播速度高，机电系数大。 该表面声波包括衬底，形成在衬底上的金刚石层，形成在金刚石层上的ZnO层和形成在ZnO层上的叉指电极，并且利用表面声学的二阶模式 在满足（2（pi）·H /（λ））= 0.9〜2.3的结构中激发的波，其中H表示ZnO层的厚度，（λ）表示声表面波的波长。 该声表面波装置可以在极高的频率范围内使用，除了滤波器之外，其也适用于谐振器，延迟线，信号处理装置，卷积器，相关器等。