公开(公告)号：US4607213A

公开(公告)日：1986-08-19

申请号：US541386

申请日：1983-10-12

Applicant: Armand P. Neukermans ,  Steven G. Eaton

Inventor： Armand P. Neukermans ,  Steven G. Eaton

IPC: H01L21/027 ,  G01B7/31 ,  G03F9/00 ,  H01L21/30 ,  G01R27/26

CPC classification number: G03F9/7053 ,  G01B7/31 ,  G03F9/7023 ,  Y10S148/102

Abstract: An aligner for aligning a mask and a wafer during photolithography of a semiconductor chip uses detection of the differential capacitance between two sets of conductive fingers on the mask and ridges on the wafer. An A.C. signal is applied to the ridges and the phase or amplitude of the signals coupled to the two sets of fingers is detected and compared. A shield is positioned between the ridges and the fingers to ensure that coupling occurs only between desired portions of the ridges and the fingers.

Abstract translation: 用于在半导体芯片的光刻期间对准掩模和晶片的对准器使用掩模上的两组导电指状物和晶片上的脊之间的差分电容的检测。 将A.C.信号施加到脊，并且检测并比较耦合到两组手指的信号的相位或幅度。 护罩位于脊和指状物之间，以确保联接仅发生在脊和手指的期望部分之间。

公开(公告)号：US4264817A

公开(公告)日：1981-04-28

申请号：US15689

申请日：1979-02-27

Applicant: Armand P. Neukermans ,  Douglass McManigill

Inventor： Armand P. Neukermans ,  Douglass McManigill

IPC: G01N27/64 ,  G01N27/62 ,  G01N30/70 ,  H01J39/28

CPC classification number: G01N27/626 ,  G01N30/70

Abstract: An electron capture detector in which electrons for the reaction are supplied by a filament in a cylinder through which guard gas is passed. Apertures in the cylinder permit electrons from the filament to pass into an annular space surrounding the cylinder and between it and a collector. Sample gas is passed between the aperture and the collector, the pressures being such as to be capable of minimizing the diffusion of sample gas to the filament.

Abstract translation: 电子捕获检测器，其中用于反应的电子由保护气体通过的气缸中的细丝提供。 气缸中的孔允许来自细丝的电子进入围绕圆柱体并且在其与收集器之间的环形空间中。 样品气体在孔和集电器之间通过，压力使得能够最小化样品气体到细丝的扩散。