公开(公告)号：US20050110986A1

公开(公告)日：2005-05-26

申请号：US11020603

申请日：2004-12-21

申请人： Mehrdad Nikoonahad ,  Stanley Stokowski ,  Keith Wells ,  Brian Leslie

发明人： Mehrdad Nikoonahad ,  Stanley Stokowski ,  Keith Wells ,  Brian Leslie

IPC分类号： G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N21/956

摘要： An optical scanning system and method for detecting anomalies, including pattern defects and particulate contaminants, on both patterned and unpatterned surfaces, using a light beam, scanning at a grazing angle with respect to the surfaces, a plurality of detectors and an interchannel communication scheme to compare data from each detector, which facilitates characterizing anomalies. The light beam illuminates a spot on the surface which is scanned over a short scan-line. The surface is moved in a manner so that the spot is scanned over its entire area in a serpentine fashion along adjacent striped regions. The plurality of detectors include groups of collector channels disposed circumferentially around the surface, a bright field reflectivity/autoposition channel, an alignment/registration channel and an imaging channel. The collector channels in each group are symmetrically disposed, in the azimuth, on opposite sides of the center of the scan line. The position of the collector channels, as well as the polarization of the beam, facilitates distinguishing pattern defects from particulate contaminants. The bright field reflectivity/autoposition channel is positioned to receive specularly reflected light that carries information concerning local variation in reflectivity, which is used to classify detected anomalies, as well as determine variations in the height of the surface. The alignment/registration channel is positioned to detect a maximum of the light scattered from the pattern on the surface to ensure that the streets of die present on the surface are oriented so as not to be oblique with respect to the scan line. The imaging channel combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the present system.

摘要翻译： 一种光学扫描系统和方法，用于使用光束，相对于表面以掠射角扫描，在图案化和未图案化的表面上检测包括图案缺陷和颗粒污染物的异常，多个检测器和通道间通信方案， 比较每个检测器的数据，这有助于表征异常。 光束照射在短扫描线上扫描的表面上的斑点。 表面以使得斑点沿着相邻条纹区域以蛇形方式在其整个区域上扫描的方式移动。 多个检测器包括围绕表面周向设置的集电极通道组，亮场反射率/自动对位通道，对准/配准通道和成像通道。 每个组中的收集器通道在扫描线的中心的相对侧对称地设置在方位角上。 收集器通道的位置以及光束的极化有助于区分图案缺陷和颗粒污染物。 亮场反射率/自动定位通道被定位成接收镜面反射光，其携带关于反射率的局部变化的信息，其用于对检测到的异常进行分类，以及确定表面高度的变化。 定位/配准通道用于检测从表面上的图案散射的光的最大值，以确保表面上存在的模具的街道被定向成相对于扫描线不倾斜。 成像通道结合了扫描系统和成像系统的优点，同时提高了本系统的信号/背景比。

公开(公告)号：US06888627B2

公开(公告)日：2005-05-03

申请号：US10411646

申请日：2003-04-10

申请人： Brian C. Leslie ,  Mehrdad Nikoonahad ,  Keith B. Wells

发明人： Brian C. Leslie ,  Mehrdad Nikoonahad ,  Keith B. Wells

IPC分类号： G01N21/956 ,  G01N21/94 ,  G01N21/88

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N21/9501

摘要： In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface. Different defect maps provided by the output of the detectors can be compared to identify and classify the defects. The imaging function of the array of sensors combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the system.

摘要翻译： 在用于检测样品表面上的颗粒和图案缺陷的光学扫描系统中，光束被聚焦到表面上的照明光斑上，并且沿着扫描线扫描光斑。 检测器邻近表面定位以收集来自检测器包括传感器的一维或二维阵列的点的散射光。 沿着扫描线的多个位置中的每一个处从照明点散射的光被聚焦到阵列中的对应的传感器上。 相对于照明光束对称放置的多个检测器检测来自光斑的横向和前向散射光。 在比表面尺寸短的扫描线段的阵列上扫描该点。 亮场通道可以调整样品表面的高度，以校正由表面的高度变化引起的误差。 可以比较由检测器输出提供的不同缺陷图，以识别和分类缺陷。 传感器阵列的成像功能结合了扫描系统和成像系统的优点，同时提高了系统的信号/背景比。

公开(公告)号：US06867862B2

公开(公告)日：2005-03-15

申请号：US10718780

申请日：2003-11-20

申请人： Mehrdad Nikoonahad

发明人： Mehrdad Nikoonahad

IPC分类号： G01B11/24 ,  G01F20060101 ,  G01N21/47 ,  G01N21/88

CPC分类号： G01N21/4788

摘要： A metrology system for characterizing three-dimensional structures and methods for manufacturing and using same. The metrology system includes a measurement system that preferably comprises an energy source and energy detector and that is in communication with a processing system. Under control of the processing system, the metrology system rotates the measurement system relative to a structure while the energy source directs a beam of incident energy toward the structure. The incident energy rebounds from the structure as scattered energy, at least a portion of which propagates toward the energy detector. Due to the relative rotation, the energy detector receives scattered energy from the structure at a plurality of angles, and the measurement system produces data signals therefrom, which data signals are provided to the processing system. The processing system analyzes the data signals to determine whether the structure has any defects, such as yield limiting deviations or other processing defects.

摘要翻译： 用于表征三维结构的计量系统及其制造和使用方法。 测量系统包括优选地包括能量源和能量检测器并且与处理系统通信的测量系统。 在处理系统的控制下，计量系统相对于结构旋转测量系统，而能量源将入射能量束引向结构。 入射能量从结构反弹为散射能量，其中至少一部分向能量探测器传播。 由于相对旋转，能量检测器以多个角度从结构接收散射能量，并且测量系统从其产生数据信号，哪些数据信号被提供给处理系统。 处理系统分析数据信号以确定结构是否具有任何缺陷，例如屈服限制偏差或其他处理缺陷。

公开(公告)号：US20050036137A1

公开(公告)日：2005-02-17

申请号：US10948814

申请日：2004-09-22

申请人： Mehrdad Nikoonahad ,  Stanley Stokowski

发明人： Mehrdad Nikoonahad ,  Stanley Stokowski

IPC分类号： G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N21/956

摘要： A high sensitivity and high throughput surface inspection system directs a focused beam of light at a grazing angle towards the surface, to be inspected. Relative motion is caused between the beam and the surface so that the beam scans a scan path covering substantially the entire surface and light scattered along the path is collected for detecting anamolies. The scan path comprises a plurality of arrays of straight scan path segments. The focused beam of light illuminates an area of the surface between 5-15 microns in width and this system is capable of inspecting in excess of about 40 wafers per hour for 150 millimeter diameter wafers (6-inch wafers), in excess of about 20 wafers per hour for 200 millimeter diameter wafers (8-inch wafers) and in excess of about 10 wafers per hour for 300 millimeter diameter wafers (12-inch wafers).

摘要翻译： 高灵敏度和高通量的表面检查系统将聚焦光束以掠射角朝向表面引导，以进行检查。 在光束和表面之间产生相对运动，使得光束扫描覆盖基本上整个表面的扫描路径，并且收集沿着路径散射的光以便用于检测烟雾。 扫描路径包括多个直扫描路径段阵列。 聚焦光束照射宽度为5-15微米之间的表面区域，该系统能够对于150毫米直径的晶片（6英寸晶片）每小时检查超过约40个晶片，超过约20个 对于300毫米直径的晶片（12英寸晶圆），每小时200毫米直径晶圆（8英寸晶圆）的晶片每小时超过约10片。

公开(公告)号：US06215551B1

公开(公告)日：2001-04-10

申请号：US09213022

申请日：1998-12-16

申请人： Mehrdad Nikoonahad ,  Stanley E. Stokowski

发明人： Mehrdad Nikoonahad ,  Stanley E. Stokowski

IPC分类号： G01N2188

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N21/956

摘要： A high sensitivity and high throughput surface inspection system directs a focused beam of light at a grazing angle towards the surface to be inspected. Relative motion is caused between the beam and the surface so that the beam scans a scan path covering substantially the entire surface and light scattered along the path is collected for detecting anamolies. The scan path comprises a plurality of arrays of straight scan path segments. The focused beam of light illuminates an area of the surface between 5-15 microns in width and this system is capable of inspecting in excess of about 40 wafers per hour for 150 millimeter diameter wafers (6-inch wafers), in excess of about 20 wafers per hour for 200 millimeter diameter wafers (8-inch wafers) and in excess of about 10 wafers per hour for 300 millimeter diameter wafers (12-inch wafers).

摘要翻译： 高灵敏度和高通量的表面检查系统将聚焦光束以掠射角度朝向要检查的表面。 在光束和表面之间产生相对运动，使得光束扫描覆盖基本上整个表面的扫描路径，并且收集沿着路径散射的光以便用于检测烟雾。 扫描路径包括多个直扫描路径段阵列。 聚焦光束照射宽度为5-15微米之间的表面区域，该系统能够对于150毫米直径的晶片（6英寸晶片）每小时检查超过约40个晶片，超过约20个 对于300毫米直径的晶片（12英寸晶圆），每小时200毫米直径晶圆（8英寸晶圆）的晶片每小时超过约10片。

公开(公告)号：US5883710A

公开(公告)日：1999-03-16

申请号：US499995

申请日：1995-07-10

申请人： Mehrdad Nikoonahad ,  Stanley E. Stokowski

发明人： Mehrdad Nikoonahad ,  Stanley E. Stokowski

IPC分类号： G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N21/956

摘要： A high sensitivity and high throughput surface inspection system directs a focused beam of light at a grazing angle towards the surface to be inspected. Relative motion is caused between the beam and the surface so that the beam scans a scan path covering substantially the entire surface and light scattered along the path is collected for detecting anamolies. The scan path comprises a plurality of arrays of straight scan path segments. The focused beam of light illuminates an area of the surface between 5-15 microns in width and this system is capable of inspecting in excess of about 40 wafers per hour for 150 millimeter diameter wafers (6-inch wafers), in excess of about 20 wafers per hour for 200 millimeter diameter wafers (8-inch wafers) and in excess of about 10 wafers per hour for 300 millimeter diameter wafers (12-inch wafers).

公开(公告)号：US5825482A

公开(公告)日：1998-10-20

申请号：US827859

申请日：1997-04-09

申请人： Mehrdad Nikoonahad ,  Charles E. Wayman

发明人： Mehrdad Nikoonahad ,  Charles E. Wayman

IPC分类号： G01B11/30 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N21/956 ,  G01N2021/8825

摘要： An optical surface inspection system is designed to correct for misregistration errors. A reference vector of data samples is obtained by computing an average of adjacent data sample vectors. A comparison of the data samples in a current vector being processed to data samples that may be offset from such current vector along the direction of the current vector enables the detection and correction of misregistration errors. Alternatively, a target array of data samples is compared to a reference array of data samples collected from a different portion of the surface with various offsets for detection and correction of misregistration errors. The intensity of the reflection from the inspection beam may be monitored to vary the intensity of the inspection beam so as to reduce the dynamic range of background scattering.

摘要翻译： 光学表面检查系统设计用于校正不对准误差。 通过计算相邻数据样本向量的平均值来获得数据样本的参考向量。 将正在处理的当前矢量中的数据样本与可能沿着当前矢量的方向偏离这种电流矢量的数据样本的比较使得能够检测和校正不对准误差。 或者，将目标数据样本阵列与从表面的不同部分收集的具有各种偏移的数据样本的参考阵列进行比较，以检测和校正不对准误差。 可以监视来自检查光束的反射强度以改变检查光束的强度，以便减小背景散射的动态范围。

公开(公告)号：US4852575A

公开(公告)日：1989-08-01

申请号：US160871

申请日：1988-02-26

申请人： Mehrdad Nikoonahad

发明人： Mehrdad Nikoonahad

IPC分类号： A61B8/06

CPC分类号： A61B8/06

摘要： An ultrasound lens is a solid rod with a front concave spherical surface which defines a back focal plane in the rod when the lens is immersed in a propagating medium. The opposite end of the rod has two flat rear surfaces which are attached to ultrasound transducers and are inclined with respect to the lens axis so that principal rays from each of the transducers propagate through the lens normal to the rear surface and intersect on the lens axis at the back focal plane.Echo ultrasound signals obtained from a sample volume using the lens may be cross correlated to yield transverse flow measurement data in the sample volume.

摘要翻译： 超声波透镜是具有前凹球面的实心杆，当透镜浸入传播介质中时，其限定杆中的后焦平面。 杆的相对端具有两个平坦的后表面，其附接到超声换能器并且相对于透镜轴线倾斜，使得来自每个换能器的主光线穿过透镜垂直于后表面传播并且在透镜轴线上相交 在后焦平面。 使用透镜从样品体积获得的回波超声信号可以是交叉相关的，以产生样品体积中的横向流量测量数据。

公开(公告)号：US20100116325A1

公开(公告)日：2010-05-13

申请号：US12616732

申请日：2009-11-11

申请人： Mehrdad Nikoonahad

发明人： Mehrdad Nikoonahad

IPC分类号： H01L31/048 ,  H01L21/50

CPC分类号： H01L31/02021 ,  H01L27/1421 ,  H01L31/044 ,  H01L31/048 ,  H01L31/0504 ,  H02J3/383 ,  Y02B10/14 ,  Y02E10/563

摘要： Disclosed is a photovoltaic solar panel with improved efficiency and the output of such panel can be AC. The panel can comprise a hermetically sealed space which comprises a first sheet, multiple energy conversion cells divided into groups, an access matrix and a second sheet. The access matrix can provide electrical access to individual or groups of energy conversion cells from locations outside the panel. Through the access matrix, a power module can be connected to individual energy conversion cells or groups of the cells to optimize the power generation efficiency. Also disclosed are method of making such a panel. Further disclosed is a photovoltaic power generation system comprising at least one such photovoltaic solar panel.

摘要翻译： 公开了一种提高效率的光伏太阳能电池板，并且这种面板的输出可以是AC。 面板可以包括密封空间，其包括第一片，分成组的多个能量转换细胞，存取矩阵和第二片。 访问矩阵可以从面板外部的位置提供对各个或多组能量转换单元的电气访问。 通过访问矩阵，功率模块可以连接到各个能量转换单元或单元组，以优化发电效率。 还公开了制造这种面板的方法。 还公开了包括至少一个这种光伏太阳能电池板的光伏发电系统。

公开(公告)号：US20070091325A1

公开(公告)日：2007-04-26

申请号：US11316476

申请日：2005-12-21

申请人： Mehrdad Nikoonahad

发明人： Mehrdad Nikoonahad

IPC分类号： G01B11/14

CPC分类号： G01N23/20 ,  G01B11/24 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623

摘要： A metrology system of the instant invention is configured to characterize features or structures formed on a surface of an article of manufacture. A metrology or measurement system comprises at least two channels wherein each channel comprises one or more radiation sources, illumination optics, collection optics comprising at least one window and one detector array, and processing means for comparing a received signal pattern to a calculated or previously processed signal pattern of a predetermined array of two dimension or three dimension structures or features on a surface of an article of manufacture such as a wafer, in a preferred embodiment.

摘要翻译： 本发明的计量系统被配置为表征形成在制品制品的表面上的特征或结构。 计量或测量系统包括至少两个通道，其中每个通道包括一个或多个辐射源，照明光学器件，包括至少一个窗口和一个检测器阵列的收集光学器件，以及用于将接收到的信号模式与计算出或预先处理的信号模式进行比较的处理装置 在优选实施例中，诸如晶片的制品的表面上的二维或三维结构或特征的预定阵列的信号图案。