公开(公告)号：US5763875A

公开(公告)日：1998-06-09

申请号：US280387

申请日：1994-07-26

申请人： Stefan Kaesdorf ,  Matthias Wagner ,  Hartmut Schroder

发明人： Stefan Kaesdorf ,  Matthias Wagner ,  Hartmut Schroder

IPC分类号： H01J49/16 ,  B01D59/44 ,  H01J49/00

CPC分类号： H01J49/162

摘要： A mass spectrographic method and apparatus provide simultaneous quantification of multiple target species of gaseous neutral particles that may be laser sputtered from a sample. The invention employs non-resonant multiphoton ionization of the target species with a high intensity laser beam propagated toward a given extraction volume from which volume ions are withdrawn for quantification. In preferred embodiments, the given volume is defined by an acceptance aperture and a transverse energy acceptance interval which is itself defined by energy discrimination of the ions into bunches with a novel ion mirror. An inventive embodiment of ion mirror has four grids at different spacings and potentials with a second grid away from the acceptance aperture having a potential just below a third to separate out an undesired, low-energy ion bunch. Curves for simultaneously quantifying Ta.sup.+ ions with Ta.sup.++ ions are shown.

摘要翻译： 质谱方法和装置提供可以从样品激光溅射的气态中性粒子的多个靶物种的同时定量。 本发明使用目标物种的非共振多光子电离与向给定的提取体积传播的高强度激光束，从中提取体积离子用于定量。 在优选实施例中，给定体积由接受孔径和横向能量接受间隔限定，该间隔本身通过用新型离子镜将离子能量鉴定为束而定义。 离子镜的发明实施例具有不同间隔和电势的四个栅格，远离接收孔的第二栅极具有刚好低于三分之一的电位，以分离出不期望的低能量离子束。 示出了用Ta ++离子同时量化Ta +离子的曲线。