Method for producing transparent conductive film
    71.
    发明授权
    Method for producing transparent conductive film 有权
    透明导电膜的制造方法

    公开(公告)号:US08580088B2

    公开(公告)日:2013-11-12

    申请号:US13280758

    申请日:2011-10-25

    IPC分类号: C23C14/34

    摘要: A method for producing a transparent conductive film including a transparent film substrate and a crystalline transparent conductive layer, including: a first depositing a first indium-based complex oxide having a first tetravalent metal element oxide on the transparent film substrate; and a second depositing indium oxide or a second indium-based complex oxide and lower than the tetravalent metal element oxide content of the indium-based complex oxide used in the first depositing by sputtering to form an amorphous transparent conductive layer, and crystallizing the amorphous transparent conductive layer. The method allows a reduction in crystallization time.

    摘要翻译: 一种透明导电膜的制造方法,所述透明导电膜包括透明膜基板和结晶透明导电层,其包括:在所述透明膜基板上首先沉积具有第一四价金属元素氧化物的第一铟基复合氧化物; 以及第二沉积铟氧化物或第二铟基复合氧化物,并且低于用于首先通过溅射沉积形成非晶透明导电层的铟基复合氧化物的四价金属元素氧化物含量,并且使无定形透明 导电层。 该方法允许降低结晶时间。

    TRANSPARENT CONDUCTIVE FILM AND MANUFACTURING METHOD THEREFOR
    73.
    发明申请
    TRANSPARENT CONDUCTIVE FILM AND MANUFACTURING METHOD THEREFOR 审中-公开
    透明导电薄膜及其制造方法

    公开(公告)号:US20130288047A1

    公开(公告)日:2013-10-31

    申请号:US13997466

    申请日:2011-12-14

    IPC分类号: H01B1/08

    摘要: Disclosed is a highly productive method for manufacturing a transparent conductive film. The method includes the step of sputter depositing a transparent, amorphous tin-indium oxide conductive layer on a transparent substrate. The surface of the substrate, on which the transparent conductive layer is formed, has an arithmetic mean roughness Ra of 1.0 or less. The sputter depositing step is performed under an atmosphere having a water partial pressure of 0.1% or less based on an AR gas partial pressure at a base material temperature of more than 100° C. and 200° C. or less, using a metal target or oxide target in which the amount of tin atoms is more than 6% by weight and 15% by weight or less, based on the total weight of indium and tin atoms.

    摘要翻译: 公开了用于制造透明导电膜的高生产率的方法。 该方法包括在透明基板上溅射沉积透明的非晶态的锡 - 铟氧化物导电层的步骤。 其上形成有透明导电层的基板表面的算术平均粗糙度Ra为1.0以下。 溅射沉积步骤是在基于大于100℃和200℃或更低的基材温度的AR气体分压下,在水分压为0.1%以下的气氛下,使用金属靶 或氧化物靶,其中锡原子的量大于6重量%且15重量%以下,基于铟和锡原子的总重量。

    Method for manufacturing transparent conductive film
    74.
    发明授权
    Method for manufacturing transparent conductive film 有权
    透明导电膜的制造方法

    公开(公告)号:US09059369B2

    公开(公告)日:2015-06-16

    申请号:US13606780

    申请日:2012-09-07

    IPC分类号: B32B38/08 H01L31/18

    摘要: A method for manufacturing a transparent conductive film that can reduce a heating time of crystallizing an amorphous layer containing an indium-based complex oxide is provided. The method for manufacturing a transparent conductive film according to the present invention includes a first step of laminating an amorphous layer formed of an indium-based complex oxide on a first side of a film base material having a thickness of 10 to 50 μm, a second step of forming a transparent conductive layer by heating the film base material on which the amorphous layer is laminated to 160° C. or above to crystallize the amorphous layer during a process of conveying the film base material from a feed roller and taking up the film base material on a take-up roller, and a third step of forming an adhesive layer on a second side of the film base material.

    摘要翻译: 提供一种制造透明导电膜的方法,该透明导电膜可以减少结晶含有铟基复合氧化物的非晶层的加热时间。 根据本发明的制造透明导电膜的方法包括:在厚度为10〜50μm的膜基材的第一面层叠由铟系复合氧化物形成的非晶层的第一工序,第二工序 通过将层叠有非晶层的膜基材加热至160℃以上,在从进料辊输送薄膜基材并卷取薄膜的工序中使非晶体层结晶而形成透明导电层的工序 并且在所述薄膜基材的第二面上形成粘合剂层的第三工序。