摘要:
An ink jet printer head includes a spacer including pressure generating chambers continuous to nozzle openings, ink supply paths, and reservoirs, a cover member for covering the pressure generating chambers in a sealing fashion, and pressure generating means for generating pressure in the pressure generating chambers in accordance with print data. In processing a silicon single-crystal substrate vertically oriented in (110) by anisotropic etching process, one of the walls of a path hole for forming a pressure generating chamber is aligned with one of the walls of a path hole for forming a reservoir. Walls defining the path hole for forming a pressure generating chamber, which are located in the vicinity of a nozzle opening, are connected to each other at an obtuse angle. As a result, the ink supply path serving as a narrow path for ink flow and the pressure generating chamber are formed as smooth flow paths. The walls in an area in the vicinity of the nozzle opening where ink tends to stay are substantially equally distanced from the nozzle opening. A smooth flow of ink is ensured.
摘要:
An ink jet recording head having a spacer including a pressure generating chamber, a reservoir, and an ink supply port connecting them, a nozzle plate, hermetically fixed on a first side of the spacer, for generating ink droplets when receiving an ink pressure from the pressure generating chamber, a vibrating plate, hermetically fixed on a second side of the spacer, for pressing the pressure generating chamber, and piezoelectric vibrators for pressing the vibrating plate, wherein the vibrating plate has thin portions each occupying a large area so that the compliance of a regional area closer to the nozzle openings is larger than a regional area closer to the ink supply port.