公开(公告)号：US5861626A

公开(公告)日：1999-01-19

申请号：US831170

申请日：1997-04-02

Applicant: Dipankar Chandra ,  Donald F. Weirauch ,  Thomas C. Penn

Inventor： Dipankar Chandra ,  Donald F. Weirauch ,  Thomas C. Penn

IPC: H01L21/304 ,  H01L27/14 ,  H01L31/18

CPC classification number: H01L27/14649 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/2803 ,  H01L21/02381 ,  H01L21/02411 ,  H01L21/0256 ,  H01L21/02562 ,  H01L21/02625 ,  H01L21/02639 ,  H01L27/144 ,  H01L31/02164 ,  H01L31/095

Abstract: A multiple film integrated infrared (IR) detector assembly 85 consists of detector films 86, 88, 90 having different IR spectral sensitivities which are deposited on a breadboard IR transmissive but electrically insulating substrate 42. Substrate 42 is deposited on an IR filter layer comprising an HgCdTe film 70. By various techniques described, filter film 70 has a varying composition from edge 68 to 72. This compositional gradient of film 70 results in varying IR spectral absorption as shown by IR transmission graphs 10, 12, 14. Film 70 acts as a graded IR filter in concert with the response of the detector films 86, 88, 90. By the proper choice of the compositional gradients in these films, and as a result the IR spectral response, an integrated IR spectrometer may be fabricated whereby each detector 86, 87, 90 detects only specific narrow bands of IR wavelengths.

Abstract translation: 多重膜集成红外（IR）检测器组件85由检测器膜86,88,90组成，其具有不同的IR光谱灵敏度，其被沉积在面包板IR透射但电绝缘基底42上。基底42沉积在包括 HgCdTe膜70.通过所描述的各种技术，过滤膜70具有从边缘68至72变化的组成。膜70的组成梯度导致红外光谱吸收变化，如IR透射图10,12,14所示。膜70作为 与检测器膜86,88,90的响应一致的分级红外滤光器。通过适当选择这些膜中的组成梯度，结果可以制造IR光谱响应，可以制造集成的IR光谱仪，由此每个检测器 86,87,90仅检测特定的IR波长的窄带。