公开(公告)号：US20100257641A1

公开(公告)日：2010-10-07

申请号：US11545498

申请日：2006-10-11

申请人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

发明人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

IPC分类号： G01Q10/00 ,  G12B13/00

CPC分类号： G01Q40/02 ,  G01Q10/065

摘要： A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.

摘要翻译： 一种用于在一个或多个维度空间中对准，稳定和对准两个或多个结构的方法和装置，其尺寸精度为皮秒。 低噪声激光被至少一个或多个结构或基准标记分散。 一个标记可以联接到要定位的每个结构。 已经从基准标记分散的光被收集在能够实现每个结构的实时高带宽位置感测的光敏装置中。 一个或多个结构应安装在舞台上，舞台可以在一个或多个维度上移动。 光敏装置响应于所接收的散射光产生信号，并且该信号用于在反馈回路中调制载物台的位置。