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公开(公告)号：US20110035848A1
公开(公告)日：2011-02-10
申请号：US12806086
申请日：2010-08-05
IPC分类号： G01Q10/04
摘要： The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface.
摘要翻译： 本发明涉及一种使用具有三维配准到表面的激光引导尖端方法，以高精度和精确度将尖锐物体快速且可重复地以高精度和精确度将锋利物体紧密地附接到样品的特定感兴趣区域的方法。
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2.发明授权Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions 有权在一个或多个维度上实时，活跃的波段尺度对齐，稳定和注册公开(公告)号：US07928409B2
公开(公告)日：2011-04-19
申请号：US11545498
申请日：2006-10-11
IPC分类号： G03F9/00
CPC分类号： G01Q40/02 , G01Q10/065
摘要： A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.
摘要翻译： 一种用于在一个或多个维度空间中对准，稳定和对准两个或多个结构的方法和装置，其尺寸精度为皮秒。 低噪声激光被至少一个或多个结构或基准标记分散。 一个标记可以联接到要定位的每个结构。 已经从基准标记分散的光被收集在能够实现每个结构的实时高带宽位置感测的光敏装置中。 一个或多个结构应安装在舞台上，舞台可以在一个或多个维度上移动。 光敏装置响应于所接收的散射光产生信号，并且该信号用于在反馈回路中调制载物台的位置。
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3.发明申请Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions 有权在一个或多个维度上实时，活跃的波段尺度对齐，稳定和注册公开(公告)号：US20100257641A1
公开(公告)日：2010-10-07
申请号：US11545498
申请日：2006-10-11
CPC分类号： G01Q40/02 , G01Q10/065
摘要： A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.
摘要翻译： 一种用于在一个或多个维度空间中对准，稳定和对准两个或多个结构的方法和装置，其尺寸精度为皮秒。 低噪声激光被至少一个或多个结构或基准标记分散。 一个标记可以联接到要定位的每个结构。 已经从基准标记分散的光被收集在能够实现每个结构的实时高带宽位置感测的光敏装置中。 一个或多个结构应安装在舞台上，舞台可以在一个或多个维度上移动。 光敏装置响应于所接收的散射光产生信号，并且该信号用于在反馈回路中调制载物台的位置。
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