公开(公告)号：US08040655B2

公开(公告)日：2011-10-18

申请号：US12021817

申请日：2008-01-29

申请人： Zhao Weijiang ,  Ai Taura

发明人： Zhao Weijiang ,  Ai Taura

IPC分类号： H01L21/683

CPC分类号： H02N13/00 ,  H01L21/67253 ,  H01L21/6831 ,  H01L21/68707

摘要： A substrate hold apparatus is provided an electrostatic chuck for electrostatically attracting and holding a substrate thereon, a push-up member contactable with a position of vicinity of an edge of the substrate on the electrostatic chuck from below for pushing up the substrate, a drive apparatus for driving at least one of the electrostatic chuck and push-up member to thereby allow the push-up member to push up the substrate, a force sensor for detecting a force applied to the push-up member in an pushing-up operation, and a control unit wherein the control unit is configured to measure the force from the force sensor as a first measurement, output a normal state signal when the measured force in the first measurement is equal to or larger than a lower limit value and is equal to or smaller than a upper limit value.

摘要翻译： 基板保持装置设置有用于在其上静电吸引和保持基板的静电卡盘，可从下方与静电卡盘上的基板的边缘附近的位置接触以向上推动基板的上推构件，驱动装置 用于驱动静电卡盘和上推构件中的至少一个，从而允许上推构件向上推动基板;力传感器，用于在上推操作中检测施加到上推构件的力;以及 控制单元，其中所述控制单元被配置为测量来自所述力传感器的力作为第一测量，当所述第一测量中的测量力等于或大于下限值时，输出正常状态信号，并且等于或等于 小于上限值。

公开(公告)号：US20080285203A1

公开(公告)日：2008-11-20

申请号：US12021817

申请日：2008-01-29

申请人： Zhao Weijiang ,  Ai Taura

发明人： Zhao Weijiang ,  Ai Taura

IPC分类号： H01L21/683 ,  G01L1/00

CPC分类号： H02N13/00 ,  H01L21/67253 ,  H01L21/6831 ,  H01L21/68707

摘要： A substrate hold apparatus is provided an electrostatic chuck for electrostatically attracting and holding a substrate thereon, a push-up member contactable with a position of vicinity of an edge of the substrate on the electrostatic chuck from below for pushing up the substrate, a drive apparatus for driving at least one of the electrostatic chuck and push-up member to thereby allow the push-up member to push up the substrate, a force sensor for detecting a force applied to the push-up member in an pushing-up operation, and a control unit wherein the control unit is configured to measure the force from the force sensor as a first measurement, output a normal state signal when the measured force in the first measurement is equal to or larger than a lower limit value and is equal to or smaller than a upper limit value.

摘要翻译： 基板保持装置设置有用于在其上静电吸引和保持基板的静电卡盘，可从下方与静电卡盘上的基板的边缘附近的位置接触以向上推动基板的上推构件，驱动装置 用于驱动静电卡盘和上推构件中的至少一个，从而允许上推构件向上推动基板;力传感器，用于在上推操作中检测施加到上推构件的力;以及 控制单元，其中所述控制单元被配置为测量来自所述力传感器的力作为第一测量，当所述第一测量中的测量力等于或大于下限值时，输出正常状态信号，并且等于或等于 小于上限值。