公开(公告)号：US07735632B1

公开(公告)日：2010-06-15

申请号：US11395800

申请日：2006-03-31

申请人： Dave Garlow ,  Alfred Santacapita

发明人： Dave Garlow ,  Alfred Santacapita

IPC分类号： B65G25/04

CPC分类号： F16C29/08

摘要： A system and method for mounting the strip seal on the side of a pass-through positioning stage. The strip seal can effectively provide support to a cover of the stage and be magnetically coupled to the cover and base for an enhanced seal and added support. Accordingly, the tendency for the stage to sag and vibrate during operation is mitigated. Moreover, a side-mounted strip seal is exposed to a reduced amount of debris that accumulates on the top of a stag, and thus is less susceptible to contaminants entering the interior of the stage. As such, and in connection with a variety of other means for reducing contamination, the stage can operate for longer periods of time without wear and/or maintenance, etc.

摘要翻译： 一种用于将带状密封件安装在通过定位台的侧面上的系统和方法。 带状密封件可以有效地为平台的盖提供支撑并且磁耦合到盖和底座以增强密封和增加的支撑。 因此，减轻了工作阶段下垂和振动的趋势。 此外，侧面安装的带状密封件暴露于堆积在雄蕊顶部上的减少量的碎屑，因此不太容易受污染物进入阶段内部。 因此，并且为了减少污染的各种其他手段，该阶段可以运行更长的时间，而不会磨损和/或维护等。

公开(公告)号：USD584025S1

公开(公告)日：2008-12-30

申请号：US29246873

申请日：2006-05-17

申请人： Alfred Santacapita ,  David Garlow

设计人： Alfred Santacapita ,  David Garlow