公开(公告)号：US20050008980A1

公开(公告)日：2005-01-13

申请号：US10911085

申请日：2004-08-03

申请人： Chantal Arena-Foster ,  Allan Awtrey ,  Nicholas Ryza ,  Paul Schilling

发明人： Chantal Arena-Foster ,  Allan Awtrey ,  Nicholas Ryza ,  Paul Schilling

IPC分类号： B05D3/02 ,  G03C5/26 ,  G03F7/30

CPC分类号： B05D3/02 ,  G03C5/26 ,  G03F7/30

摘要： A method of developing a polymeric film without the need for a water rinse step. An object having a surface supporting a polymeric film is placed onto a support region within a pressure chamber. A fluid and developer is introduced into the pressure chamber and the object is processed at supercritical conditions to develop the polymeric film such that the polymeric film is not substantially deformed. The pressure chamber is then vented.