公开(公告)号：US07109054B2

公开(公告)日：2006-09-19

申请号：US10488942

申请日：2002-09-10

申请人： Louis Brissot ,  Amédée Sollier

发明人： Louis Brissot ,  Amédée Sollier

IPC分类号： H01L21/00

CPC分类号： H01L27/14603 ,  H01L23/3675 ,  H01L25/072 ,  H01L27/14621 ,  H01L27/1464 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to the fabrication of image sensors and especially to color image sensors. The image sensor includes a region in which there is a photosensitive matrix onto which the image to be converted into electronic signals is projected and an outer region comprising peripheral electronic circuits for driving the matrix or for processing the image signals. After formation on a substrate of a stack of conducting layers and insulating layers serving for the production of the matrix of the peripheral circuits, a substantial thickness of insulation is removed only in the region of the matrix before a mosaic of color filters is deposited so as to reduce the height of the filters relative to the photosensitive regions.

摘要翻译： 本发明涉及图像传感器的制造，特别涉及彩色图像传感器。 图像传感器包括其中投射有要转换为电子信号的图像的光敏矩阵的区域和包括用于驱动矩阵或用于处理图像信号的外围电子电路的外部区域。 在形成用于制造外围电路基体的导电层和绝缘层的基板上形成之后，仅在沉积马赛克的滤色器之前仅在矩阵的区域中去除相当大的绝缘厚度，以便 以降低滤光片相对于感光区域的高度。