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公开(公告)号：US20110050033A1
公开(公告)日：2011-03-03
申请号：US12806763
申请日：2010-08-20
IPC分类号： H02N1/08
CPC分类号： B06B1/0292
摘要： A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass.
摘要翻译： 提供压缩后电容式微机械超声波换能器（CMUT）。 压缩柱CMUT包括第一电极，具有柱孔图案的顶部导电层，包括第一电极的可移动质量块。 压缩柱CMUT还包括设置在顶部导电层的顶表面和可移动块的底表面之间的操作间隙，压缩柱的图案，其中压缩柱的近端垂直于底部表面连接 可移动质量块，其中压缩柱的图案跨过柱孔的图案。 顶部导电层包括与第一电极电子绝缘的第二电极，其中压缩柱的图案被压缩以在与可移动质量块的底表面垂直的方向上提供恢复力。
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公开(公告)号：US08451693B2
公开(公告)日：2013-05-28
申请号：US12806763
申请日：2010-08-20
CPC分类号： B06B1/0292
摘要： A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass.
摘要翻译： 提供压缩后电容式微机械超声波换能器（CMUT）。 压缩柱CMUT包括第一电极，具有柱孔图案的顶部导电层，包括第一电极的可移动质量块。 压缩柱CMUT还包括设置在顶部导电层的顶表面和可移动块的底表面之间的操作间隙，压缩柱的图案，其中压缩柱的近端垂直于底部表面连接 可移动质量块，其中压缩柱的图案跨过柱孔的图案。 顶部导电层包括与第一电极电子绝缘的第二电极，其中压缩柱的图案被压缩以在与可移动质量块的底表面垂直的方向上提供恢复力。
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