公开(公告)号：US5728254A

公开(公告)日：1998-03-17

申请号：US686546

申请日：1996-07-26

申请人： Andy Jeng

发明人： Andy Jeng

IPC分类号： H01L21/687 ,  H01L21/00

CPC分类号： H01L21/68721 ,  H01L21/68735

摘要： A structural configuration for a ceramic ring for guiding a semiconductor wafer down to the lower electrode of a dry etcher having upper and lower electrodes. The ceramic ring includes a base ring, a wall ring rising perpendicular to one surface of the base ring, and more than ten projections located on the top edge surface of the wall ring. Each of the projections includes a first and a second triangular surface, each at one end of the prismatic body and rising from the top edge surface of the wall ring. An inner sloped surface rises from-the top edge surface of the wall ring and an outer sloped surface rises from the top edge surface of the wall ring. First and second oblique sloped surfaces rise from the top edge surface of the wall ring, connecting the first and second triangular surfaces to the inner sloped surface, respectively. A trapezoidal surface having four sides, one each joined to the inner and outer sloped surfaces and the first and second oblique sloped surfaces forms an apex surface of the projection.

摘要翻译： 用于将半导体晶片向下导引到具有上电极和下电极的干蚀刻器的下电极的陶瓷环的结构构造。 陶瓷环包括基环，垂直于基环的一个表面上升的壁环和位于壁环的顶部边缘表面上的十多个突起。 每个突起包括第一和第二三角形表面，每个在棱柱体的一端处并从壁环的顶部边缘表面上升。 内倾斜表面从壁环的顶边缘表面上升，外倾斜表面从壁环的顶边缘表面上升。 第一和第二倾斜表面从壁环的顶部边缘表面上升，将第一和第二三角形表面分别连接到内部倾斜表面。 具有四个侧面的梯形表面，一个接合到内部和外部倾斜表面，并且第一和第二倾斜倾斜表面形成突起的顶点表面。

公开(公告)号：US5966767A

公开(公告)日：1999-10-19

申请号：US87062

申请日：1998-05-29

申请人： Chung-Chien Lu ,  Tien-Fu Tseng ,  Chih-Horng Chou ,  Andy Jeng

发明人： Chung-Chien Lu ,  Tien-Fu Tseng ,  Chih-Horng Chou ,  Andy Jeng

IPC分类号： B08B9/00 ,  B08B9/08 ,  B08B9/02 ,  B08B9/087

CPC分类号： B08B9/00 ,  B08B9/0808

摘要： A pipe cleaning device has a handle, a center rod, a center rod sealing plate, and a scraper assembly. The center rod has a central hollow space having one end connected to the handle and the scraper assembly mounted on the other end. The center rod sealing plate is a three-plate structure for sealing off the pipe opening. The center rod sealing plate has a central hole for the insertion of the center rod. The three-plate structure of the center rod sealing plate serves to increase the ease of disassembling and maintenance. The scraper assembly includes an upper scraper and a lower scraper, wherein the lower scraper has additional scraping knives on its blades to facilitate the scraping of blocking material inside the pipe. Moreover, the scrapers do not block off gas flow inside the pipe completely, so the pump can still pump exhaust gases out even when the scraper assembly is in use. The center rod also has a water inlet located next to the handle and a water outlet between the upper scraper and the lower scraper. Therefore, solvent or water can be pumped to assist the cleaning action.

摘要翻译： 管道清洁装置具有手柄，中心杆，中心杆密封板和刮刀组件。 中心杆具有中心中空空间，其一端连接到手柄，而刮板组件安装在另一端。 中心杆密封板是用于密封管道开口的三板结构。 中心杆密封板具有用于插入中心杆的中心孔。 中心杆密封板的三板结构有助于提高拆卸和维护的便利性。 刮刀组件包括上刮刀和下刮刀，其中下刮刀在其刀片上具有额外的刮刀，以便于刮除管内的阻塞材料。 此外，刮刀不会完全阻止管道内的气体流动，因此即使刮刀组件正在使用中，泵仍然可以排出废气。 中心杆还具有位于手柄旁边的进水口和上刮刀与下刮刀之间的出水口。 因此，可以泵送溶剂或水以帮助清洁动作。