公开(公告)号：US20070054501A1

公开(公告)日：2007-03-08

申请号：US11210546

申请日：2005-08-23

申请人： April Carman ,  Thomas Zemanian ,  Glen Fryxell ,  Daniel Gasper

发明人： April Carman ,  Thomas Zemanian ,  Glen Fryxell ,  Daniel Gasper

IPC分类号： H01L21/31

CPC分类号： H01L21/3105 ,  H01L21/02101

摘要： The invention relates to a process for modifying materials including, e.g., dielectric materials associated with electronic substrates, semiconductor chips, wafers, and the like, damaged by fabrication processes such as plasma etch processing. The described method improves structural integrity as measured, e.g., by Young's Modulus, as well as hydrophobicity, as measured, e.g., by contact angles at the liquid/surface interface.

摘要翻译： 本发明涉及一种用于改性材料的方法，包括例如与通过诸如等离子体蚀刻加工的制造工艺损坏的电子基板，半导体芯片，晶片等相关的介电材料。 所描述的方法提高了例如通过杨氏模量测量的结构完整性，以及例如通过液体/表面界面处的接触角测量的疏水性。

公开(公告)号：US20070085014A1

公开(公告)日：2007-04-19

申请号：US11254620

申请日：2005-10-19

申请人： Justin McIntyre ,  James Hayes ,  Matthew Cooper ,  Michael Ripplinger ,  April Carman

发明人： Justin McIntyre ,  James Hayes ,  Matthew Cooper ,  Michael Ripplinger ,  April Carman

IPC分类号： G01T1/20

CPC分类号： G01T1/2026 ,  G01T1/172

摘要： A method and apparatus are disclosed for measuring charged particle and photon coincident radiation. The method and apparatus measure radioisotopes having beta-gamma coincident spectroscopies, providing spectral resolution and efficency that improve calibration and maintenance characteristics as well as isotope identifying characteristics important in industrial, defense, security, and human health applications.

摘要翻译： 公开了用于测量带电粒子和光子重合辐射的方法和装置。 该方法和装置测量具有β-gamma重合光谱的放射性同位素，提供改善校准和维护特性的光谱分辨率和效率以及在工业，防御，安全和人类健康应用中重要的同位素识别特征。