公开(公告)号：US06836690B1

公开(公告)日：2004-12-28

申请号：US10199278

申请日：2002-07-19

申请人： Blaine R. Spady ,  William A. McGahan ,  James V. Read ,  Arosha W. Goonesekera ,  Eric A. Rost

发明人： Blaine R. Spady ,  William A. McGahan ,  James V. Read ,  Arosha W. Goonesekera ,  Eric A. Rost

IPC分类号： H01L2166

CPC分类号： H01L21/681 ,  H01L21/68707 ,  H01L21/68728 ,  H01L21/68785

摘要： A prealigner includes a light source and light detector that detects the position of the periphery of a substrate as a rotary chuck rotates the substrate. The prealigner includes a processor that receives and records the peripheral position of the substrate relative to the angular position of the substrate. The prealigner determines the center of the substrate by fitting a curve to the recorded data set, after eliminating any spikes in the data, e.g., caused by the notch or parts of the chuck. The center may then be easily and accurately determined using the amplitude and phase of the fitted curve. The position of the notch is determined by fitting a curve to the data set for the notch and determining the derivative of the curve. The mid-point of the notch and the offset error of the apex of the notch from the mid-point are calculated based on the derivative.

摘要翻译： 预对准器包括光源和光检测器，其当旋转卡盘旋转基板时检测基板周边的位置。 预对准器包括处理器，其接收并记录基板相对于基板的角位置的周边位置。 在消除数据中的任何尖峰，例如由卡盘的凹口或部分引起的尖峰之后，预对准器通过将曲线拟合到记录的数据集来确定基板的中心。 然后可以使用拟合曲线的幅度和相位容易且准确地确定中心。 通过将曲线拟合到凹口的数据集并确定曲线的导数来确定凹口的位置。 根据导数计算切口的中点和中点处的切口顶点的偏移误差。