公开(公告)号：US5728940A

公开(公告)日：1998-03-17

申请号：US739729

申请日：1996-11-07

Applicant: Dae-woo Kim ,  Jae-kyung Lee ,  Bon-rip Koo ,  Sang-woon Kim

Inventor： Dae-woo Kim ,  Jae-kyung Lee ,  Bon-rip Koo ,  Sang-woon Kim

IPC: G01M3/04 ,  G01M3/20 ,  G01N33/00 ,  G05B9/02 ,  H01L21/02 ,  H01L21/66 ,  G01M3/18 ,  G01N31/08

CPC classification number: G01N33/0011 ,  G01M3/20

Abstract: A leakage gas detector for a semiconductor device includes a plurality of inflow apertures into which leakage gas flows. A detector sequentially detects the leakage gas in each of the inflow apertures via a plurality of valves, so as to leak test each of the plurality of inflow apertures for presence of possible leakage gas. Each of the plurality of valves are connected to corresponding of the plurality of inflow apertures to control the suction of the leakage gas into the detector. A controller selectively opens and closes each of the plurality of valves.

Abstract translation: 用于半导体器件的泄漏气体检测器包括泄漏气体流入的多个流入孔。 检测器通过多个阀顺序地检测每个流入孔中的泄漏气体，以便泄漏测试多个流入孔中的每一个以存在可能的泄漏气体。 多个阀中的每一个连接到多个流入孔的对应部分，以控制泄漏气体进入检测器的抽吸。 控制器选择性地打开和关闭多个阀中的每一个。