公开(公告)号：US06341532B1

公开(公告)日：2002-01-29

申请号：US09667511

申请日：2000-09-22

Applicant: Diao Xu ,  Teng Yong Ng ,  Tieying Jiang ,  Khin Yong Lam ,  Boo Cheong Khoo

Inventor： Diao Xu ,  Teng Yong Ng ,  Tieying Jiang ,  Khin Yong Lam ,  Boo Cheong Khoo

IPC: G01N324

CPC classification number: G01L1/148 ,  G01N11/02 ,  G01P5/02

Abstract: A micro-dimensional sensor measures the shear force, both in magnitude and direction, at the surface of a solid boundary as a fluid flows over that boundary. The sensor is a micro-mechanical capacitor-transducer system that includes a micro-dimensioned floating upper plate above a fixed lower plate supported on a substrate. The floating upper plate is mounted and held over the substrate by a number of zig-zap form supporting arms. The flow passing over the upper plate displaces the upper plate in a downstream direction, which results in a measurable change of the capacitance in the capacitor-transducer system. The direction and magnitude of the shear forces can then be obtained from the measured capacitance through specially designed circuitry.

Abstract translation: 当流体流过该边界时，微尺寸传感器在固体边界的表面处测量幅度和方向上的剪切力。 传感器是一种微机电容换能器系统，其中包括一个支撑在基板上的固定下板上方的微尺寸浮动上板。 浮动的上板通过多个Z形支撑臂安装并保持在基板上。 通过上板的流动使上板在下游方向上移动，这导致电容器 - 换能器系统中的电容的可测量的变化。 然后可以通过专门设计的电路从测量的电容获得剪切力的方向和大小。