公开(公告)号：US07777178B2

公开(公告)日：2010-08-17

申请号：US11277261

申请日：2006-03-23

申请人： Geun-Young Yeom ,  Sang-Duk Park ,  Chang-Kwon Oh

发明人： Geun-Young Yeom ,  Sang-Duk Park ,  Chang-Kwon Oh

IPC分类号： H05H3/02

CPC分类号： H05H1/46 ,  H05H2001/4667

摘要： A plasma generating apparatus and method using a neutral beam, capable of readily generating plasma at the same gas flow rate by changing the structure of an ion gun, without a separate ignition device, are provided. The apparatus includes a plasma generating part formed of a quartz cup, a radio frequency (RF) applying antenna disposed at the periphery of the plasma generating part, a cooling water supply part disposed at the periphery of the plasma generating part, and an igniter in direct communication with the plasma generating part, wherein a gas for generating plasma is supplied into the igniter, and the igniter has a higher local pressure than the plasma generating part at the same gas flow rate. The ion gun is also cheaper to manufacture since it does not require a separate power supply.

摘要翻译： 提供了一种使用中性束的等离子体发生装置和方法，其能够通过改变离子枪的结构而容易地以相同的气体流量产生等离子体，而不需要单独的点火装置。 该装置包括由石英杯形成的等离子体产生部件，设置在等离子体产生部件周边的射频（RF）施加天线，设置在等离子体产生部件周边的冷却水供应部分，以及点火器 与等离子体产生部件的直接连通，其中用于产生等离子体的气体被供应到点火器中，并且点火器具有比等离子体产生部件具有相同气体流量的更高的局部压力。 离子枪制造成本也便宜，因为它不需要单独的电源。

公开(公告)号：US20070221833A1

公开(公告)日：2007-09-27

申请号：US11277261

申请日：2006-03-23

申请人： Geun-Young YEOM ,  Sang-Duk PARK ,  Chang-Kwon OH

发明人： Geun-Young YEOM ,  Sang-Duk PARK ,  Chang-Kwon OH

IPC分类号： H05H1/00

CPC分类号： H05H1/46 ,  H05H2001/4667

摘要： A plasma generating apparatus and method using a neutral beam, capable of readily generating plasma at the same gas flow rate by changing the structure of an ion gun, without a separate ignition device, are provided. The apparatus includes a plasma generating part formed of a quartz cup, a radio frequency (RF) applying antenna disposed at the periphery of the plasma generating part, a cooling water supply part disposed at the periphery of the plasma generating part, and an igniter in direct communication with the plasma generating part, wherein a gas for generating plasma is supplied into the igniter, and the igniter has a higher local pressure than the plasma generating part at the same gas flow rate. The ion gun is also cheaper to manufacture since it does not require a separate power supply.

摘要翻译： 提供了一种使用中性束的等离子体产生装置和方法，其能够通过改变离子枪的结构而容易地以相同的气体流量产生等离子体，而不需要单独的点火装置。 该装置包括由石英杯形成的等离子体产生部件，设置在等离子体产生部件周边的射频（RF）施加天线，设置在等离子体产生部件周边的冷却水供应部分，以及点火器 与等离子体产生部件的直接连通，其中用于产生等离子体的气体被供应到点火器中，并且点火器具有比等离子体产生部件具有相同气体流量的更高的局部压力。 离子枪制造成本也便宜，因为它不需要单独的电源。