公开(公告)号：US20060043029A1

公开(公告)日：2006-03-02

申请号：US10931123

申请日：2004-08-30

申请人： Chih-Tien Chang ,  Cheng-Husn Chan ,  Bing-Hung Chen ,  Hsueh-Chang Wu ,  Mei-Sheng Zhou

发明人： Chih-Tien Chang ,  Cheng-Husn Chan ,  Bing-Hung Chen ,  Hsueh-Chang Wu ,  Mei-Sheng Zhou

IPC分类号： B01D29/66

CPC分类号： B01D37/00 ,  B24B57/02

摘要： A continuous liquid delivery system which includes at least one primary filter and at least one secondary filter for alternatively receiving a liquid such as a CMP polishing slurry. A primary backwash circuit is provided in fluid communication with each primary filter for backwashing of the primary filter. At least one secondary backwash circuit is provided in fluid communication with each secondary filter for backwashing of the secondary filter. As the liquid is distributed through the primary filter or filters, the secondary filter or filters can be backwashed, and vice-versa to facilitate a continuous flow of the liquid from a source to a destination.

摘要翻译： 一种连续液体输送系统，其包括至少一个初级过滤器和至少一个辅助过滤器，用于替代地接收液体，例如CMP抛光浆料。 提供主回流电路与每个主过滤器流体连通，用于主过滤器的反冲洗。 提供至少一个二次反洗电路与每个二次过滤器流体连通，用于二次过滤器的反冲洗。 当液体通过主过滤器或过滤器分配时，二次过滤器或过滤器可以被反冲洗，反之亦然，以便于液体从源到目的地的连续流动。