公开(公告)号：US20080121799A1

公开(公告)日：2008-05-29

申请号：US11932083

申请日：2007-10-31

申请人： Chohei Kanno ,  Hirotami Koike ,  Toru Tojo

发明人： Chohei Kanno ,  Hirotami Koike ,  Toru Tojo

IPC分类号： G21K5/00

CPC分类号： H01J37/28 ,  H01J37/228 ,  H01J2237/047 ,  H01J2237/21 ,  H01J2237/2808 ,  H01J2237/281

摘要： A sample analyzing apparatus includes: an irradiation system which irradiates a charged particle onto a sample having a concave portion partially on a surface thereof; a light condensing reflecting mirror which condenses luminescence obtained from the surface based on the irradiation of the charged particle; a light detector which detects the luminescence guided to the light condensing reflecting mirror; a charged particle detector which detects the charged particle reflected from the surface of the sample as a reflection charged particle; and a signal processor which controls the irradiation system to irradiate the charged particle intermittently, which obtains a shape of the sample on the basis of a detection signal outputted from the charged particle detector, and which identifies a material of the sample on the basis of an attenuation characteristic of a detection signal outputted from the light detector in a period from a time point in which the intermittent irradiation of the charged particle by the irradiation system is ended to a time point in which the intermittent irradiation of the charged particle by the irradiation system is started.

摘要翻译： 样品分析装置包括：照射系统，其将带电粒子照射到其表面上部分地具有凹部的样品上; 聚光反射镜，其基于带电粒子的照射而凝结从表面获得的发光; 光检测器，其检测被引导到聚光反射镜的发光; 检测从样品表面反射的带电粒子作为反射带电粒子的带电粒子检测器; 以及信号处理器，其控制照射系统间歇地照射带电粒子，其基于从带电粒子检测器输出的检测信号获得样本的形状，并且基于以下方式识别样品的材料 在从照射系统的带电粒子的间歇照射的时间点到达照射系统的带电粒子的间歇照射的时间点的期间，从光检测器输出的检测信号的衰减特性 开始了