公开(公告)号：US06781383B2

公开(公告)日：2004-08-24

申请号：US10295350

申请日：2002-11-15

申请人： Kevin O'Leary ,  John Scanlan ,  Ciaran O'Morain

发明人： Kevin O'Leary ,  John Scanlan ,  Ciaran O'Morain

IPC分类号： G01N2762

CPC分类号： H01J37/32082 ,  H01J37/32935

摘要： A method of fault detection is described for use in a plasma process chamber powered by an RF source and subject to periodic standard preventive maintenance. Prior to a production run, the changes in magnitude of a plurality of Fourier components of the RF source resulting from known changes in a plurality of process conditions are determined and a single parameter which is a linear combination of a selected subset of said components is constructed. The construction is such that the combination is relatively sensitive to pre-selected process changes and relatively insensitive to said standard preventive maintenance. Then, during the production run, the single parameter is monitored to determine if there is a fault in the plasma process.

摘要翻译： 描述了一种用于由RF源供电并经过周期性标准预防性维护的等离子体处理室中的故障检测方法。 在生产运行之前，确定由多个处理条件中的已知变化产生的RF源的多个傅立叶分量的幅度变化，并且构成作为所述分量的选定子集的线性组合的单个参数 。 这种结构使得组合对预先选择的过程变化相对敏感，并且对所述标准预防性维护相对不敏感。 然后，在生产运行期间，监视单个参数以确定等离子体过程中是否存在故障。

公开(公告)号：US06501285B1

公开(公告)日：2002-12-31

申请号：US09650256

申请日：2000-08-29

申请人： Michael B. Hopkins ,  Ciaran O'Morain ,  Francisco Martinez

发明人： Michael B. Hopkins ,  Ciaran O'Morain ,  Francisco Martinez

IPC分类号： G01R2726

CPC分类号： G01R15/181 ,  G01R15/142

摘要： A sensor for detecting RF current flowing in a conductor includes a layer 10 of insulating material with a hole 16 for the passage of the RF conductor 18 in a direction normal to the layer. A plurality of conductive tracks 20, 22 (FIG. 3) on the opposite major surfaces of the layer are selectively joined by a plurality of through-holes each containing conductive material. The conductive material selectively connects the conductive elements 20, 22 to form a plurality of loops (FIG. 4) disposed non-parallel to the layer 10 for inductive coupling to the RF conductor 18.

摘要翻译： 用于检测在导体中流动的RF电流的传感器包括具有孔16的绝缘材料层10，用于使RF导体18沿垂直于该层的方向通过。 在层的相对的主表面上的多个导电轨道20,22（图3）通过多个包含导电材料的通孔选择性地接合。 导电材料选择性地连接导电元件20,22以形成非平行于层10设置的多个环（图4），用于感应耦合到RF导体18。