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公开(公告)号：US20090289196A1
公开(公告)日：2009-11-26
申请号：US12533939
申请日：2009-07-31
IPC分类号： H01J3/14
CPC分类号： H01J37/1474 , H01J37/1477 , H01J37/28 , H01J37/302 , H01J37/304 , H01J37/3056 , H01J2237/1516 , H01J2237/30461 , H01J2237/30483
摘要： Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
摘要翻译： 当光束重新定位时通过偏转系统运送的带电粒子没有被接收到正确的偏转力并被误导。 通过将信号独立地应用于偏转系统的多个阶段，减少了像素变化期间的误导粒子的数量。
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公开(公告)号：US08101928B2
公开(公告)日：2012-01-24
申请号：US12533939
申请日：2009-07-31
CPC分类号： H01J37/1474 , H01J37/1477 , H01J37/28 , H01J37/302 , H01J37/304 , H01J37/3056 , H01J2237/1516 , H01J2237/30461 , H01J2237/30483
摘要： Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
摘要翻译： 当光束重新定位时通过偏转系统运送的带电粒子没有被接收到正确的偏转力并被误导。 通过将信号独立地应用于偏转系统的多个阶段，减少了像素变化期间的误导粒子的数量。
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公开(公告)号：US07569841B2
公开(公告)日：2009-08-04
申请号：US11433048
申请日：2006-05-12
CPC分类号： H01J37/1474 , H01J37/1477 , H01J37/28 , H01J37/302 , H01J37/304 , H01J37/3056 , H01J2237/1516 , H01J2237/30461 , H01J2237/30483
摘要： Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
摘要翻译： 当光束重新定位时通过偏转系统运送的带电粒子没有被接收到正确的偏转力并被误导。 通过将信号独立地应用于偏转系统的多个阶段，减少了像素变化期间的误导粒子的数量。
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