公开(公告)号：US06676813B1

公开(公告)日：2004-01-13

申请号：US10097893

申请日：2002-03-13

Applicant: Denis V. Pelekhov ,  P. Chris Hammel ,  Geoffrey Nunes, Jr. ,  Melissa M. Midzor ,  Michael Roukes

Inventor： Denis V. Pelekhov ,  P. Chris Hammel ,  Geoffrey Nunes, Jr. ,  Melissa M. Midzor ,  Michael Roukes

IPC: C23C1400

CPC classification number: G01Q60/56 ,  Y10S977/865

Abstract: A method for coating the tip of a mechanical resonator for use in magnetic force microscopy and magnetic resonance force microscopy in which the tip is coated with a ferromagnetic material and the cantilever is not, and the product resulting from the method. A cantilever and incorporated tip are coated with a photoresist, except that surface tension keeps photoresist off the tip. The cantilever and tip are then coated with a magnetic material. Next, acetone is used to lift off the magnetic material from the cantilever but not from the tip.

Abstract translation: 用于涂覆用于磁力显微镜和磁共振力显微镜的机械谐振器的尖端的方法，其中尖端涂覆有铁磁材料，并且悬臂不是，并且由该方法产生的产物。 悬臂和引入的尖端涂覆有光致抗蚀剂，除了表面张力将光致抗蚀剂从尖端保持下来。 然后用磁性材料涂覆悬臂和尖端。 接下来，丙酮用于从悬臂上提取磁性材料，但不从尖端剥离。