公开(公告)号：US5954878A

公开(公告)日：1999-09-21

申请号：US876273

申请日：1997-06-16

申请人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Emir Guegrer ,  Edmond R. Ward

发明人： Robert P. Mandal ,  James C. Grambow ,  Ted C. Bettes ,  Donald R. Sauer ,  Emir Guegrer ,  Edmond R. Ward

IPC分类号： G03F7/16 ,  B01J19/00 ,  B05C5/00 ,  B05C11/06 ,  B05D1/00 ,  B05D3/04 ,  G03F1/16 ,  H01L21/00 ,  H01L21/027 ,  B05B13/02

CPC分类号： H01L21/6715 ,  B05D1/005 ,  B05D3/0486

摘要： A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapour and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

摘要翻译： 一种用聚合物溶液涂覆基材以产生均匀厚度的膜的方法和装置，包括将基板安装在封闭的壳体内，并将控制气体（其可以是溶剂蒸气承载气体）通过一个 进口。 聚合物溶液沉积在壳体中的基底表面上，然后旋转基底。 控制气体和悬浮在控制气体中的任何溶剂蒸汽和颗粒污染物通过出口从壳体排出，并且通过控制壳体的温度和产生溶剂蒸气的气体的溶剂来控制溶剂蒸汽浓度 。 而是可以通过混合具有不同溶剂浓度的气体来控制浓度。 也可以控制气体的湿度。