公开(公告)号：US20100096071A1

公开(公告)日：2010-04-22

申请号：US11959959

申请日：2007-12-19

申请人： Woo Young LEE ,  Kye Jin JEON ,  Eun Song Yi LEE

发明人： Woo Young LEE ,  Kye Jin JEON ,  Eun Song Yi LEE

IPC分类号： H05K3/00 ,  C23C14/34

CPC分类号： G01N33/005 ,  B82Y15/00

摘要： Disclosed is a method for manufacturing a hydrogen sensor using Pd nano-wires. The method includes steps of forming an external electrode pattern on a substrate applying a first resin layer to the substrate and forming a resin layer nano-channel pattern; depositing Pd on the substrate having the nano-channel pattern, by sputtering, and removing the first resin layer to form Pd nano-wires; applying a second resin layer to the substrate having the Pd nano-wires, and forming a resin layer pattern on the external electrode pattern, at opposing ends of the Pd nano-wires, and at predetermined positions between the external electrode pattern and the opposing ends of the Pd nano-wires; and depositing conductive metal on the resin layer pattern and removing the resin layer pattern, thereby electrically connecting the external electrode pattern to the Pd nano-wires.

摘要翻译： 公开了使用Pd纳米线制造氢传感器的方法。 该方法包括以下步骤：在基板上施加第一树脂层并形成树脂层纳米通道图案的基板上形成外部电极图案; 通过溅射在具有纳米通道图案的衬底上沉积Pd并除去第一树脂层以形成Pd纳米线; 在具有Pd纳米线的基板上施加第二树脂层，在外部电极图案上形成树脂层图案，在Pd纳米线的相对端，并且在外部电极图案和相对端之间的预定位置 的Pd纳米线; 并在树脂层图案上沉积导电金属并除去树脂层图案，从而将外部电极图案电连接到Pd纳米线。

公开(公告)号：US07875194B2

公开(公告)日：2011-01-25

申请号：US11959959

申请日：2007-12-19

申请人： Woo Young Lee ,  Kye Jin Jeon ,  Eun Song Yi Lee

发明人： Woo Young Lee ,  Kye Jin Jeon ,  Eun Song Yi Lee

IPC分类号： C23F1/00

CPC分类号： G01N33/005 ,  B82Y15/00

摘要： Disclosed is a method for manufacturing a hydrogen sensor using Pd nano-wires. The method includes steps of forming an external electrode pattern on a substrate applying a first resin layer to the substrate and forming a resin layer nano-channel pattern; depositing Pd on the substrate having the nano-channel pattern, by sputtering, and removing the first resin layer to form Pd nano-wires; applying a second resin layer to the substrate having the Pd nano-wires, and forming a resin layer pattern on the external electrode pattern, at opposing ends of the Pd nano-wires, and at predetermined positions between the external electrode pattern and the opposing ends of the Pd nano-wires; and depositing conductive metal on the resin layer pattern and removing the resin layer pattern, thereby electrically connecting the external electrode pattern to the Pd nano-wires.

摘要翻译： 公开了使用Pd纳米线制造氢传感器的方法。 该方法包括以下步骤：在基板上施加第一树脂层并形成树脂层纳米通道图案的基板上形成外部电极图案; 通过溅射在具有纳米通道图案的衬底上沉积Pd并除去第一树脂层以形成Pd纳米线; 在具有Pd纳米线的基板上施加第二树脂层，在外部电极图案上形成树脂层图案，在Pd纳米线的相对端，并且在外部电极图案和相对端之间的预定位置 的Pd纳米线; 并在树脂层图案上沉积导电金属并除去树脂层图案，从而将外部电极图案电连接到Pd纳米线。