公开(公告)号：US4508610A

公开(公告)日：1985-04-02

申请号：US584178

申请日：1984-02-27

Applicant: Eva C. Freeman ,  Donald H. Baird

Inventor： Eva C. Freeman ,  Donald H. Baird

IPC: C23C14/06 ,  H01L33/00 ,  H05B33/10 ,  H05B33/14 ,  C23C15/00

CPC classification number: H05B33/145 ,  C23C14/0629 ,  H01L33/0037 ,  H05B33/10

Abstract: A method of coactivating a rare earth activated, electroluminescent zinc sulfide film with activator gas is described. The phosphor film is deposited upon a substrate by co-sputtering from a zinc sulfide target and a rare earth target in an atmosphere such as hydrogen, chlorine, fluorine or bromine, and an inert gas.

Abstract translation: 描述了用活化剂气体共活化稀土活化的电致发光硫化锌膜的方法。 通过在诸如氢，氯，氟或溴的气氛和惰性气体中从硫化锌靶和稀土靶共同溅射将磷光体膜沉积在衬底上。