Active sensor and method for optical illumination and detection
    1.
    发明授权
    Active sensor and method for optical illumination and detection 失效
    用于光学照明和检测的主动传感器和方法

    公开(公告)号:US07170605B2

    公开(公告)日:2007-01-30

    申请号:US10647855

    申请日:2003-08-25

    IPC分类号: G01N21/25

    摘要: An active sensor a method for optical illumination and detection provides low cost and high-speed optical scanning of bio-arrays, DNA samples/chips, semiconductors, micro-electromechanical systems and other samples requiring inspection or measurement. A plurality of illumination sources forming a parallel multi-pixel array is used to illuminate one or more samples via an imaging system or by placement in close proximity to the samples. The array may be a line array or a two-dimensional array. A plurality of detectors is integrated within the multi-pixel illumination array or provided in a separate array, each detector for detecting optical properties of the sample that results from illumination by one or more associated illumination sources. One detector may be associated with multiple illuminators or one illuminator may be associated with multiple detectors. Filters may be integrated within the illumination path and/or detection paths to provide wavelength and/or polarization discrimination capability and microlenses may also be incorporated within the illumination path and/or detection paths to provide focusing or imaging. The illumination sources may be provided by TFT-LCD devices, diode emitters, organic LEDs (OLEDs), vertical cavity emitting lasers (VCELs) or other light sources that may be integrated to form a high-density illumination matrix. The detectors may be PIN photo-diodes or other suitable detectors that are capable of integration within the illumination matrix.

    摘要翻译: 有源传感器用于光学照明和检测的方法提供生物阵列,DNA样品/芯片,半导体,微机电系统和需要检查或测量的其它样品的低成本和高速光学扫描。 形成并行多像素阵列的多个照明光源用于经由成像系统照亮一个或多个样品,或通过放置在样品附近。 阵列可以是线阵列或二维阵列。 多个检测器集成在多像素照明阵列内或者设置在单独的阵列中,每个检测器用于检测由一个或多个相关照明源照明产生的样品的光学性质。 一个检测器可以与多个照明器相关联,或者一个照明器可以与多个检测器相关联。 滤光器可以集成在照明路径和/或检测路径内以提供波长和/或极化鉴别能力,并且微透镜还可以并入照明路径和/或检测路径内以提供聚焦或成像。 照明源可以由TFT-LCD器件,二极管发射器,有机LED(OLED),垂直腔发射激光器(VCEL)或其它可以集成以形成高密度照明矩阵的光源提供。 检测器可以是能够集成在照明矩阵内的PIN光电二极管或其它合适的检测器。