公开(公告)号：US06818912B2

公开(公告)日：2004-11-16

申请号：US10700445

申请日：2003-11-05

申请人： Konstantin Nikolaevitch Koshelev ,  Frederik Bijkerk ,  Givi Georgievitch Zukavishvili ,  Evgenii Dmitreevitch Korop ,  Vladimir Vital'evitch Ivanov

发明人： Konstantin Nikolaevitch Koshelev ,  Frederik Bijkerk ,  Givi Georgievitch Zukavishvili ,  Evgenii Dmitreevitch Korop ,  Vladimir Vital'evitch Ivanov

IPC分类号： G03B4200

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  H05G2/005

摘要： A radiation source includes an anode and a cathode for creating a discharge in a vapor in a space between anode and cathode and to form a plasma of a working vapor so as to generate electromagnetic radiation. The cathode defines a hollow cavity in communication with the discharge region through an aperture that has a substantially annular configuration around a central axis of said radiation source so as to initiate said discharge. A driver vapor is supplied to the cathode cavity and the working vapor is supplied in a region around the central axis in between anode and cathode.

公开(公告)号：US06667484B2

公开(公告)日：2003-12-23

申请号：US09893347

申请日：2001-06-28

申请人： Konstantin Nikolaevitch Koshelev ,  Frederik Bijkerk ,  Givi Georgievitch Zukavishvili ,  Evgenii Dmitreevitch Korop ,  Vladimir Vital'evitch Ivanov

发明人： Konstantin Nikolaevitch Koshelev ,  Frederik Bijkerk ,  Givi Georgievitch Zukavishvili ,  Evgenii Dmitreevitch Korop ,  Vladimir Vital'evitch Ivanov

IPC分类号： G03B4116

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  H05G2/005

摘要： A radiation source includes an anode and a cathode for creating a discharge in a vapor in a space between anode and cathode and to form a plasma of a working vapor so as to generate electromagnetic radiation. The cathode defines a hollow cavity in communication with the discharge region through an aperture that has a substantially annular configuration around a central axis of said radiation source so as to initiate said discharge. A driver vapor is supplied to the cathode cavity and the working vapor is supplied in a region around the central axis in between anode and cathode.

摘要翻译： 辐射源包括阳极和阴极，用于在阳极和阴极之间的空间中的蒸气中产生放电，并形成工作蒸气的等离子体，以产生电磁辐射。 阴极限定了通过孔径与放电区域连通的中空腔体，该孔口具有围绕所述辐射源的中心轴线的基本上环形的形状，以便启动所述放电。 驱动器蒸气被供应到阴极腔，并且工作蒸气在阳极和阴极之间的中心轴线周围的区域中供应。

公开(公告)号：USRE41362E1

公开(公告)日：2010-06-01

申请号：US11600340

申请日：2006-11-16

申请人： Konstantin Nikolaevitch Koshelev ,  Frederik Bijkerk ,  Givi Georgievitch Zukavishvili ,  Evgenii Dmitreevitch Korop ,  Vladimir Vital'evitch Ivanov

发明人： Konstantin Nikolaevitch Koshelev ,  Frederik Bijkerk ,  Givi Georgievitch Zukavishvili ,  Evgenii Dmitreevitch Korop ,  Vladimir Vital'evitch Ivanov

IPC分类号： A61N5/00 ,  G21G5/00

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  H05G2/005

摘要： A radiation source includes an anode and a cathode for creating a discharge in a vapor in a space between anode and cathode and to form a plasma of a working vapor so as to generate electromagnetic radiation. The cathode defines a hollow cavity in communication with the discharge region through an aperture that has a substantially annular configuration around a central axis of said radiation source so as to initiate said discharge. A driver vapor is supplied to the cathode cavity and the working vapor is supplied in a region around the central axis in between anode and cathode.

摘要翻译： 辐射源包括阳极和阴极，用于在阳极和阴极之间的空间中的蒸气中产生放电，并形成工作蒸气的等离子体，以产生电磁辐射。 阴极限定了通过孔径与放电区域连通的中空腔体，该孔口具有围绕所述辐射源的中心轴线的基本上环形的形状，以便启动所述放电。 驱动器蒸气被供应到阴极腔，并且工作蒸气在阳极和阴极之间的中心轴线周围的区域中供应。