公开(公告)号：US06646779B2

公开(公告)日：2003-11-11

申请号：US10002408

申请日：2001-11-15

Applicant: Peter B. Mumola ,  Flemming Tinker ,  Steven R. Patterson

Inventor： Peter B. Mumola ,  Flemming Tinker ,  Steven R. Patterson

IPC: G02B2600

CPC classification number: G02B26/0833

Abstract: A strain-isolated mirror is made from a substrate having first and second body portions. First and second connecting portions extend across a gap between the first body portion and the second body portion. A first flexural hinge on the first second connecting portion couples the second connecting portion to the first body portion.

公开(公告)号：US06301009B1

公开(公告)日：2001-10-09

申请号：US08982236

申请日：1997-12-01

Applicant: Flemming Tinker

Inventor： Flemming Tinker

IPC: G01B902

CPC classification number: B24B37/015 ,  G01B11/306

Abstract: At least one dimensional characteristic of a workpiece is measured, in situ, while at least one surface of the workpiece is subjected to a finishing operation. The measurements are obtained using an interferometer that generates interfering wavefronts reflected from the front and rear surfaces of the workpiece. Variations in the optical thickness of the workpiece can be determined from the resulting interferogram. The resulting optical thickness data can be used directly and/or combined with other pre-acquired data about the workpiece to obtain information concerning a desired dimensional characteristic of the workpiece. This dimensional characteristic may be transmitted wavefront error, work surface smoothness, and/or work surface profile. These measurements then can be used to terminate the finishing process at an optimal time and/or to control the operation of the surface-finishing machine. The difference in temperature between a workpiece's work surface and the surface opposed to it can also be extracted from the metrology results when measured in conjunction with a witness sample or monitor plug which demonstrates a differing thermal deformation characteristic due to a different thickness or having a differing coefficient of thermal expansion. Preferably, the witness sample or monitor plug should be made from a material that is relatively insensitive to temperature changes with respect to the workpiece. This temperature differential then can be used to control the temperature of a finishing process parameter such as slurry temperature. A finishing process that incorporates in situ metrology can dramatically reduce the surface finishing process time as compared to conventional finishing processes.

Abstract translation: 在原位测量工件的至少一维尺寸特性，同时对工件的至少一个表面进行精加工操作。 使用产生从工件的前表面和后表面反射的干扰波前的干涉仪获得测量值。 可以根据所得到的干涉图来确定工件的光学厚度的变化。 所得到的光学厚度数据可以直接使用和/或与关于工件的其它预采集数据组合以获得关于工件的期望尺寸特性的信息。 该尺寸特征可以是波前误差，工作表面平滑度和/或工作表面轮廓。 这些测量然后可以用于在最佳时间终止精加工和/或控制表面精加工机的操作。 当与待检样本或监视器塞结合测量时，可以从计量结果中提取工件的工作表面和与其相对的表面之间的温度差异，其证明由于不同的厚度或具有不同的厚度而具有不同的热变形特性 热膨胀系数。 优选地，证人样本或监视器插头应由相对于工件对温度变化相对不敏感的材料制成。 该温差可用于控制精加工工艺参数如浆料温度的温度。 与传统的精加工相比，采用原位计量的精加工工艺可以显着降低表面处理时间。