公开(公告)号：US5571970A

公开(公告)日：1996-11-05

申请号：US218973

申请日：1994-03-28

申请人： Eiji Mutoh ,  Akihiro Niiya ,  Shigemitsu Ogawa ,  Fujito Tanaka ,  Munenori Tsuchiya ,  Daiji Uehara ,  Kenji Nagasawa

发明人： Eiji Mutoh ,  Akihiro Niiya ,  Shigemitsu Ogawa ,  Fujito Tanaka ,  Munenori Tsuchiya ,  Daiji Uehara ,  Kenji Nagasawa

IPC分类号： G01L9/00 ,  G01L9/12

CPC分类号： G01L9/0075 ,  G01L9/125

摘要： A pressure sensor based on electrostatic capacity method is disclosed, which comprises the main body of a pressure sensing element having one end surface as a pressured face and the other end surface as a back, for detecting the pressure of a measurement fluid acting on the pressured face, a seal member, a measure pattern on the back, and a one-chip IC. For size reduction, an input-output policy is provided near the main body of the pressure sensing element, and it effects input and output with respect to the pressure sensing element main body while preventing external disturbances and improving the accuracy of measurement.

摘要翻译： 公开了一种基于静电容量法的压力传感器，其包括具有作为加压面的一个端面和另一个端面作为背面的压力感测元件的主体，用于检测作用在受压面上的测量流体的压力 表面，密封件，背面的测量图案以及单芯片IC。 为了减小尺寸，在压力感测元件的主体附近设置输入输出策略，并且在防止外部干扰并提高测量精度的同时，对压力感测元件主体进行输入输出。

公开(公告)号：US5561247A

公开(公告)日：1996-10-01

申请号：US218979

申请日：1994-03-28

申请人： Eiji Mutoh ,  Akihiro Niiya ,  Shigemitsu Ogawa ,  Fujito Tanaka ,  Munenori Tsuchiya ,  Daiji Uehara ,  Kenji Nagasawa

发明人： Eiji Mutoh ,  Akihiro Niiya ,  Shigemitsu Ogawa ,  Fujito Tanaka ,  Munenori Tsuchiya ,  Daiji Uehara ,  Kenji Nagasawa

IPC分类号： G01L9/00 ,  G01L9/12

CPC分类号： G01L9/0075 ,  G01L9/125

摘要： A pressure sensor of electrostatic capacitance type is disclosed, which detects the pressure of a measurement fluid acting on a pressured surface of an elastic diaphragm from a change in the electrostatic capacitance between opposed electrodes provided on opposed surface of a ceramic base and the elastic diaphragm. The base side electrode comprises a plurality of division electrode one enclosing the next inner one. Of these division electrodes the outermost one is grounded or held at a predetermined voltage, or it is covered by overcoat glass, and thus it is imparted with a function of stabilizing the measurement value. In an electrode hole for leading an electrode to the outside, a path is formed for leading atmospheric air or like fluid providing for the reference pressure for pressure measurement into the space defined between the base and elastic diaphragm.

摘要翻译： 公开了一种静电电容式的压力传感器，其从设置在陶瓷基体的相对表面上的相对电极与弹性膜片之间的静电电容的变化来检测作用在弹性膜片的加压表面上的测量流体的压力。 基极电极包括多个分隔电极，其包围下一个内电极。 在这些分割电极中，最外侧的电极接地或保持在预定电压，或被覆盖玻璃覆盖，因此赋予测量值稳定的功能。 在用于将电极引导到外部的电极孔中，形成用于引导大气空气或类似流体的路径，用于将压力测量的参考压力提供到在基部和弹性隔膜之间限定的空间中。